Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

Abstract

Large-area MoS2 atomic layers are synthesized on SiO2 substrates by chemical vapor deposition using MoO3 and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS2 monolayer. The TEM images verify that the synthesized MoS2 sheets are highly crystalline.

First submitted on 12-Dec-2011. Accepted in Adv. Mater

References in corpus (2)

• Two Dimensional Atomic Crystals
• Anomalous Lattice Vibrations of Single and Few-Layer MoS2

Cited by in corpus (106)

• Integrated Circuits Based on Bilayer MoS2 Transistors
• Measurement of the optical dielectric function of transition metal dichalcogenide monolayers: MoS2, MoSe2, WS2 and WSe2
• Phonon and Raman scattering of two-dimensional transition metal dichalcogenides from monolayer, multilayer to bulk material
• Strong light-matter coupling in two-dimensional atomic crystals
• Evolution of Interlayer Coupling in Twisted MoS2 Bilayers
• Elastic Properties of Chemical-Vapor-Deposited Monolayer MoS2, WS2, and Their Bilayer Heterostructures
• Determination of band alignment in the single layer MoS2/WSe2 heterojunction
• Vapor-Solid Growth of High Optical Quality MoS2 Monolayers With Near-Unity Valley Polarization
• Analyzing the Carrier Mobility in Transition-metal Dichalcogenide MoS2 Field-effect Transistors
• Efficient Interlayer Relaxation and Transition of Excitons in Epitaxial and Non-epitaxial MoS2/WS2 Heterostructures
• Layer-dependent properties of SnS2 and SnSe2 novel two-dimensional materials
• Influence of Stoichiometry on the Optical and Electrical Properties of Chemical Vapor Deposition Derived MoS${}_2$
• Van der Waals Materials for Atomically-Thin Photovoltaics: Promise and Outlook
• Surface Energy Engineering for Tunable Wettability through Controlled Synthesis of MoS2
• Trion induced negative photoconductivity in monolayer MoS2
• MoS2 Quantum Dot/Graphene Hybrids for Advanced Interface Engineering of CH3NH3PbI3 Perovskite Solar Cell with Efficiency over 20%
• Electrical Control of Optical Properties of Monolayer MoS${}_2$
• Observation of interlayer phonon modes in van der Waals heterostructures
• MoS2 Transistors Operating at Gigahertz Frequencies
• Mechanics of freely-suspended ultrathin layered materials
• Screw-Dislocation-Driven Growth of Two-Dimensional Few-Layer and Pyramid-Like WSe2 by Sulfur-Assisted Chemical Vapor Deposition
• Intrinsic Electrical Transport and Performance Projections of Synthetic Monolayer MoS2 Devices
• Vertical CVD Growth of Highly Uniform Transition Metal Dichalcogenides
• Molecular-beam epitaxy of monolayer and bilayer WSe2: A scanning tunneling microscopy/spectroscopy study and deduction of exciton binding energy
• Layer-by-layer epitaxial growth of scalable WSe2 on sapphire by molecular-beam epitaxy
• Large, valley-exclusive Bloch-Siegert shift in monolayer WS2
• Broad Band Optical Properties of Large Area Monolayer CVD Molybdenum Disulfide
• Raman spectrum of Janus transition metal dichalcogenide monolayers WSSe and MoSSe
• Recent Advances in Two-Dimensional Metal Monochalcogenides
• Strain, doping and electronic transport of large area monolayer MoS2 exfoliated on gold and transferred to an insulating substrate
• Electrical control of near-field energy transfer between quantum dots and 2D semiconductors
• Mutual Photoluminescence Quenching and Photovoltaic Effect in Large-Area Single-Layer MoS2-Polymer Heterojunctions
• Chemical and Electronic Repair Mechanism of Sulfur Defects in MoS${}_2$ Monolayers
• Guide to optical spectroscopy of layered semiconductors
• Heterojunction Hybrid Devices from Vapor Phase Grown MoS${}_2$
• Quantum Spin Hall Effect in 2D Transition Metal Dichalcogenide Haeckelites
• Structure, preparation, and applications of 2D material-based metal-semiconductor heterostructures
• Mesoscale Imperfections in MoS2 Atomic Layers Grown by Vapor Transport Technique
• Observation of intervalley biexcitonic optical Stark effect in monolayer WS2
• Synthesis of Highly Anisotropic Semiconducting GaTe Nanomaterials and Emerging Properties Enabled by Epitaxy
• Large-scale 2D Electronics based on Single-layer MoS2 Grown by Chemical Vapor Deposition
• Epitaxial Growth of Large Area Single-Crystalline Few-Layer MoS2 with Room Temperature Mobility of 192 cm2V-1s-1
• Electric field and Strain-induced Band-gap Engineering and Manipulation of the Rashba Spin Splitting in Janus van der Waals Heterostructures
• Revealing the Brønsted-Evans-Polanyi Relation in Halide-Activated Fast MoS2 Growth Towards Millimeter-Sized 2D Crystals
• Mixed-Salt Enhanced Chemical Vapor Deposition of Two-Dimensional Transition Metal Dichalcogenides
• In-situ exfoliation method of large-area 2D materials
• Perforating freestanding molybdenum disulfide monolayers with highly charged ions
• Stability of charged sulfur vacancies in 2D and bulk MoS${}_2$ from plane-wave density functional theory with electrostatic corrections
• Size, Shape, and Phase Control in Ultrathin CdSe Nanosheets
• Progress and Prospects in Two-Dimensional Magnetism of van der Waals Materials
• Effect of different precursors on CVD growth of molybdenum disulfide
• NaCl-assisted CVD growth of wafer scale high quality trilayer MoS${}_2$ and the role of concentration boundary layer
• Toward Low-Temperature Solid-Source Synthesis of Monolayer MoS2
• Defect Engineering of Two-dimensional Molybdenum Disulfide
• Low-loss integrated nanophotonic circuits with layered semiconductor materials
• Apparent Differences between Single Layer Molybdenum Disulfide Fabricated via Chemical Vapor Deposition and Exfoliation
• Dielectrophoretic assembly of liquid-phase-exfoliated TiS3 nanoribbons for photodetecting applications
• Effects of CVD Growth Parameters on Global and Local Optical Properties of MoS${}_2$ Monolayers
• Few-Layer MoS${}_2$/a-Si:H Heterojunction pin-Photodiodes for extended Infrared Detection
• Transport properties of the top and bottom surfaces in monolayer MoS2 grown by chemical vapor deposition
• Synthesis of built-in highly strained monolayer MoS2 using liquid precursor chemical vapor deposition
• Fluid Guided CVD Growth for Large-scale Monolayer Two-dimensional Materials
• Mobility enhancement in CVD-grown monolayer MoS2 via patterned substrate induced non-uniform straining
• Spin-dependent Refraction at the Atomic Step of Transition-metal Dichalcogenides
• Visualization of defect-induced excitonic properties of the edges and grain boundaries in synthesized monolayer molybdenum disulfide
• Robust B-exciton emission at room temperature in few-layers of MoS2:Ag nanoheterojunctions embedded into a glass matrix
• Direct evidence of electronic interaction at the atomic-layer-deposited MoS2 monolayer/SiO2 interface
• Electron spin dynamics of two-dimensional layered materials
• Excitonic response in TMD heterostructures from first-principles: impact of stacking, twisting, and interlayer distance
• Growth and applications of two-dimensional single crystals
• Dynamic Growth/Etching Model for the Synthesis of Two-Dimensional Transition Metal Dichalcogenides via Chemical Vapour Deposition
• Decoupling Molybdenum Disulfide from its Substrate by Cesium Intercalation
• Scalable Transfer-Free Fabrication of MoS${}_2$/SiO${}_2$ Hybrid Nanophotonic Cavity Arrays with Quality Factors Exceeding 4000
• Guiding principles for the design of a chemical vapor deposition process for highly crystalline transition metal dichalcogenides
• Superior Gas Sensing Properties of $\beta$-In${}_2$Se${}_3$: A First-Principles Investigation
• Velocity distributions of particles sputtered from supported 2D-MoS${}_2$ during highly charged ion irradiation
• Thermal boundary conductance of CVD-grown MoS${}_2$ monolayer-on-silica substrate determined by scanning thermal microscopy
• The role of Al2O3 interlayer in the synthesis of ZnS/Al2O3/MoS2 core-shell nanowires
• A simple KPFM-based approach for electrostatic-free topographic measurements: the case of MoS${}_2$ on SiO${}_2$
• Concurrent growth and formation of electrically contacted monolayer transition metal dichalcogenides on bulk metallic patterns
• Unveiling the multi-level structure of midgap states in Sb-doped MoX${}_2$ (X = S, Se, Te) monolayers
• An investigation on electronic and magnetic properties of Cr substituted MoS${}_2$ monolayer and multilayers-Hybrid functional calculations
• Scalable transparent conductive thin films with electronically passive interfaces for direct chemical vapor deposition of 2D materials
• Stable $2R$ van der Waals heterostructures of NbS${}_2$ and $M$Se${}_2$ for $M$=Mo and W
• Direct transformation of crystalline MoO${}_3$ into few-layers MoS${}_2$
• Magnetic Field-Induced Polar Order in Monolayer Molybdenum Disulfide Transistors
• Lateral heterojunctions within monolayer semiconductors
• Intrinsic spin-valley locking for conducting electrons in metal-semiconductor-metal lateral hetero-structures of $1H$-transition-metal dichalcogenides
• Large-area Epitaxial Monolayer MoS2
• Effect of Interfacial Defects on the Electronic Properties of MoS${}_2$ Based Lateral T-H Heterophase Junctions
• Atomic Scale Insights Into The Mechanical Characteristics of Monolayer 1T-Titanium Disulphide: A Molecular Dynamics Study
• Reevaluating the electrical impact of atomic carbon impurities in MoS2
• Two-dimensional antiferromagnetic semiconductor T'-MoTeI from first principles
• The role of intrinsic atomic defects in a Janus MoSSe/XN (X = Al, Ga) heterostructure: a first principles study
• Phosphorene: Fabrication, Properties and Applications
• Directly grown monolayer MoS2 on Au foils as efficient hydrogen evolution catalysts
• Growth-Etch Metal-Organic Chemical Vapor Deposition Approach of WS2 Atomic-Layers
• Etching-free transfer of wafer-scale MoS2 films
• Enhanced chemical vapour deposition of monolayer MoS2 films via a clean promoter
• Electrical characterization of structured platinum diselenide devices
• Direct and Scalable Chemical Vapor Deposition of Ultrathin Low-Noise MoS2 Membranes on Apertures
• Dissolution-Precipitation Growth of Uniform and Clean Two Dimensional Transition Metal Dichalcogenides
• Quantization Phenomena of critical Hamiltonians in 2D systems
• Graphene Based Opt-Thermoelectric Tweezers
• Fast transient charge trapping in salt-aided CVD synthesized monolayer MoS2 field-effect transistor
• Vertically-oriented MoS${}_2$ nanosheets for nonlinear optical devices