Low-loss integrated nanophotonic circuits with layered semiconductor materials

Abstract

Monolayer transition metal dichalcogenides with direct bandgaps are emerging candidates for microelectronics, nano-photonics, and optoelectronics. Transferred onto photonic integrated circuits (PICs), these semiconductor materials have enabled new classes of light-emitting diodes, modulators and photodetectors, that could be amenable to wafer-scale manufacturing. For integrated photonic devices, the optical losses of the PICs are critical. In contrast to silicon, silicon nitride (Si3N4) has emerged as a low-loss integrated platform with a wide transparency window from ultraviolet to mid-infrared and absence of two-photon absorption at telecommunication bands. Moreover, it is suitable for nonlinear integrated photonics due to its high Kerr nonlinearity and high-power handing capability. These features of Si3N4 are intrinsically beneficial for nanophotonics and optoelectronics applications. Here we report a low-loss integrated platform incorporating monolayer molybdenum ditelluride (1L-MoTe2) with Si3N4 photonic microresonators. We show that, with the 1L-MoTe2, microresonator quality factors exceeding 3 million in the telecommunication O-band to E-band are maintained. We further investigate the change of microresonator dispersion and resonance shift due to the presence of 1L-MoTe2, and extrapolate the optical loss introduced by 1L-MoTe2 in the telecommunication bands, out of the excitonic transition region. Our work presents a key step for low-loss, hybrid PICs with layered semiconductors without using heterogeneous wafer bonding.

References in corpus (46)

• Atomically thin MoS2: A new direct-gap semiconductor
• Two Dimensional Atomic Crystals
• Graphene Photonics and Optoelectronics
• Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition
• Two-Dimensional Material Nanophotonics
• Graphene photodetectors for high-speed optical communications
• Excitons in atomically thin transition metal dichalcogenides
• All-optical signal processing platforms for CMOS compatible integrated nonlinear optics
• Electrically Tunable Excitonic Light Emitting Diodes based on Monolayer WSe2 p-n Junctions
• Light-emitting diodes by bandstructure engineering in van der Waals heterostructures
• Electrical Control of Two-Dimensional Neutral and Charged Excitons in a Monolayer Semiconductor
• Optical modulators with two-dimensional layered materials
• The Shear Mode of Multi-Layer Graphene
• Rayleigh Imaging of Graphene and Graphene Layers
• Breaking the Loss Limitation of On-chip High-confinement Resonators
• Shear and Layer Breathing Modes in Multilayer MoS2
• Cleaning Interfaces in Layered Materials Heterostructures
• Nanophotonic soliton-based microwave synthesizers
• Graphene-Based Integrated Photonics For Next-Generation Datacom And Telecom
• Light-matter interaction in a microcavity-controlled graphene transistor
• Integrated gallium phosphide nonlinear photonics
• Mode spectrum and temporal soliton formation in optical microresonators
• Enhanced four-wave-mixing with 2D layered graphene oxide films integrated with CMOS compatible micro-ring resonators
• Graphene oxide for enhanced nonlinear optics in low and high index contrast waveguides and nanowires
• Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion
• Broadband, electrically tuneable, third harmonic generation in graphene
• Charge-tuneable biexciton complexes in monolayer WSe${}_2$
• Probing the loss origins of ultra-smooth $\mathrm{S}{\mathrm{i}}_3{\mathrm{N}}_4$ integrated photonic waveguides
• Ultra-strong nonlinear optical processes and trigonal warping in MoS${}_2$ layers
• Low-loss composite photonic platform based on 2D semiconductor monolayers
• Minimizing Residues and Strain in 2D Materials Transferred from PDMS
• Ultralow-power chip-based soliton microcombs for photonic integration
• Nanophotonics with 2D Transition Metal Dichalcogenides
• Observation of stimulated Brillouin scattering in silicon nitride integrated waveguides
• High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics
• Physical origin of Davydov splitting and resonant Raman spectroscopy of Davydov components in multilayer MoTe2
• Optical bandgap engineering in nonlinear silicon nitride waveguides
• Excitonic properties of semiconducting monolayer and bilayer MoTe2
• Strongly coupled coherent phonons in single-layer MoS${}_2$
• Excitonic emission of monolayer semiconductors near-field coupled to high-Q microresonators
• Double inverse nanotapers for efficient light coupling to integrated photonic devices
• Hot electrons modulation of third harmonic generation in graphene
• Niobium diselenide superconducting photodetectors
• Silicon-nitride photonic circuits interfaced with monolayer MoS${}_2$
• Frequency Comb Assisted Broadband Precision Spectroscopy with Cascaded Diode Lasers
• Anomalous Non-linear Optical Response Of Graphene Near Phonon Resonances

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• Parametric Nonlinear Optics with Layered Materials and Related Heterostructures
• A Monolithic Graphene-Functionalized Microlaser for Multispecies Gas Detection
• Piezoelectric actuation for integrated photonics
• Exploring the structural and optoelectronic properties of natural insulating phlogopite in van der Waals heterostructures
• Raman and Far Infrared Synchrotron Nanospectroscopy of Layered Crystalline Talc: Vibrational Properties, Interlayer Coupling and Symmetry Crossover
• Phyllosilicates as earth-abundant layered materials for electronics and optoelectronics: Prospects and challenges in their ultrathin limit
• Quantization of mode shifts in nanocavities integrated with atomically thin sheets
• Van der Waals functionalization of ultrahigh-Q silica microcavities for ${\chi }^{(2)}$-${\chi }^{(3)}$ hybrid nonlinear photonics