Atomically precise placement of single dopants in Si

Abstract

We demonstrate the controlled incorporation of P dopant atoms in Si (001) presenting a new path toward the creation of atomic-scale electronic devices. We present a detailed study of the interaction of PH3 with Si (001) and show that it is possible to thermally incorporate P atoms into Si (001) below the H desorption temperature. Control over the precise spatial location at which P atoms are incorporated was achieved using STM H-lithography. We demonstrate the positioning of single P atoms in Si with ~ 1 nm accuracy and the creation of nanometer wide lines of incorporated P atoms.

5 pages, 4 figures

References in corpus (2)

• Towards the fabrication of phosphorus qubits for a silicon quantum computer
• Encapsulation of phosphorus dopants in silicon for the fabrication of a quantum computer

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