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L. Oberbeck

4 papers hereh-index 262k citations80 works total

Matching runs newest-first, so older work may not be attached to this profile yet.

author position
  • first author2
  • middle author2

Across the 4 of 4 papers where every author was matched, so the position is known.

fields
  • cond-mat2
  • cond-mat.mtrl-sci2

identity via Semantic Scholar / OpenAlex

most citedAtomically precise placement of single dopants in Si

402 citations · 602 across the 4 of their papers we have counts for

collaborators

4 papers

cond-mat.mtrl-sci2003★ 44 cited

STM characterization of the Si-P heterodimer

N. J. Curson, S. R. Schofield, M. Y. Simmons +3

We use scanning tunneling microscopy (STM) and Auger electron spectroscopy to study the behavior of adsorbed phosphine (PH3​) on Si(001), as a function of annealing temperature…

cond-mat.mtrl-sci2003★ 402 cited

Atomically precise placement of single dopants in Si

S. R. Schofield, N. J. Curson, M. Y. Simmons +4

We demonstrate the controlled incorporation of P dopant atoms in Si (001) presenting a new path toward the creation of atomic-scale electronic devices. We present a detailed study…

cond-mat2003★ 58 cited

Measurement of phosphorus segregation in silicon at the atomic-scale using STM

Lars Oberbeck, Neil J. Curson, Toby Hallam +3

In order to fabricate precise atomic-scale devices in silicon using a combination of scanning tunnelling microscopy (STM) and molecular beam epitaxy it is necessary to minimize the…

cond-mat2002★ 98 cited

Encapsulation of phosphorus dopants in silicon for the fabrication of a quantum computer

L. Oberbeck, N. J. Curson, M. Y. Simmons +4

The incorporation of phosphorus in silicon is studied by analyzing phosphorus delta-doped layers using a combination of scanning tunneling microscopy, secondary ion mass spectromet…

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