Enhancing the reactivity of Si(100)-Cl toward PBr3 by charging Si dangling bonds

Abstract

The interaction of the PBr3 molecule with Si dangling bonds (DBs) on a chlorinated Si(100) surface was studied. The DBs were charged in a scanning tunneling microscope (STM) and then exposed to PBr3 directly in the STM chamber. Uncharged DBs rarely react with molecules. On the contrary, almost all positively charged DBs were filled with molecule fragments. As a result of the PBr3 interaction with the positively charged DB, the molecule dissociated into PBr2 and Br with the formation of a Si-Br bond and PBr2 desorption. These findings show that charged DBs significantly modify the reactivity of the surface towards PBr3. Additionally, we calculated PH3 adsorption on a Si(100)-2x1-H surface with DBs and found that the DB charge also has a significant impact. As a result, we demonstrated that the positively charged DB with a doubly unoccupied state enhances the adsorption of molecules with a lone pair of electrons.

References in corpus (5)

• First-Principle Study of Phosphine Adsorption on Si(001)-2$\times$1-Cl
• Area-selective deposition and B $\delta$-doping of Si(100) with BCl${}_3$
• AlCl${}_3$-dosed Si(100)-2$\times$1: Adsorbates, chlorinated Al chains, and incorporated Al
• Local removal of silicon layers on Si(100)-2x1 with chlorine-resist STM lithography
• Dangling bonds on the Cl- and Br-terminated Si(100) surfaces

Cited by in corpus (1)

• Calculations of pathways of precise P incorporation into chlorinated Si(100) surface