10 citations · 20 across the 2 of their papers we have counts for
3 papers
Dangling bonds on the Cl- and Br-terminated Si(100) surfaces
T. V. Pavlova, V. M. Shevlyuga, B. V. Andryushechkin +1
Halogen monolayer on a silicon surface is attracting active attention for applications in electronic device fabrication with individual impurities. To create a halogen mask for the…
Chlorine insertion and manipulation on the Si(100)-2x1-Cl surface in the regime of local supersaturation
T. V. Pavlova, V. M. Shevlyuga, B. V. Andryushechkin +1
We insert and manipulate a single chlorine atom in chlorine monolayer on a Si(100)-2x1 surface using a scanning tunneling microscope. Two objects were created - a Cl atom in a groo…
Local removal of silicon layers on Si(100)-2x1 with chlorine-resist STM lithography
T. V. Pavlova, V. M. Shevlyuga, B. V. Andryushechkin +2
We report the realization of STM-based lithography with silicon layers removal on the chlorinated Si(100)-2x1 surface at 77 K. In contrast to other STM lithography studies, we were…