Chloride Molecular Doping Technique on 2D Materials: WS2 and MoS2

Abstract

Low-resistivity metal-semiconductor (M-S) contact is one of the urgent challenges in the research of 2D transition metal dichalcogenides (TMDs). Here, we report a chloride molecular doping technique which greatly reduces the contact resistance (Rc) in the few-layer WS2 and MoS2. After doping, the Rc of WS2 and MoS2 have been decreased to 0.7 kohm*um and 0.5 kohm*um, respectively. The significant reduction of the Rc is attributed to the achieved high electron doping density thus significant reduction of Schottky barrier width. As a proof-ofconcept, high-performance few-layer WS2 field-effect transistors (FETs) are demonstrated, exhibiting a high drain current of 380 uA/um, an on/off ratio of 4*106, and a peak field-effect mobility of 60 cm2/V*s. This doping technique provides a highly viable route to diminish the Rc in TMDs, paving the way for high-performance 2D nano-electronic devices.

published in Nano Letters ASAP

References in corpus (5)

• Two Dimensional Atomic Crystals
• Integrated Circuits Based on Bilayer MoS2 Transistors
• Channel Length Scaling of MoS2 MOSFETs
• Field-effect transistors and intrinsic mobility in ultra-thin MoSe2 layers
• Quantitative Determination of the Band-Gap of WS2 with Ambipolar Ionic Liquid-Gated Transistors

Cited by in corpus (18)

• Improved Contacts to MoS2 Transistors by Ultra-High Vacuum Metal Deposition
• Electrical suppression of all nonradiative recombination pathways in monolayer semiconductors
• High Current Density in Monolayer MoS${}_2$ Doped by AlO${}_x$
• Low Resistance Metal Contacts to MoS2 Devices with Nickel-Etched-Graphene Electrodes
• Intrinsic Electrical Transport and Performance Projections of Synthetic Monolayer MoS2 Devices
• Carrier Transport at the Metal-MoS2 Interface
• Modulating Electronic Structure of Monolayer Transition Metal Dichalcogenides by Substitutional Nb-Doping
• Doped-MoSe2 nanoflakes/3d metal oxide-hydr(oxy)oxides hybrid catalysts for pH-universal electrochemical hydrogen evolution reaction
• Contact Research Strategy for Emerging Molybdenum Disulfide and Other Two-Dimensional Field-effect Transistors
• The Role of Transport Agents in MoS2 Single Crystals
• Degenerately Doped Transition Metal Dichalcogenides as Ohmic Homojunction Contacts to Transition Metal Dichalcogenide Semiconductors
• Photoresponse of atomically thin MoS2 layers and their planar heterojunctions
• Engineering the optoelectronic properties of MoS2 photodetectors through reversible noncovalent functionalization
• Chlorine doping of MoSe2 flakes by ion implantation
• Combinatorial Large-area MoS2/Anatase-TiO2 interface: A Pathway to Emergent Optical and Opto-electronic Functionalities
• Growth and applications of two-dimensional single crystals
• Contact-induced doping in aluminum-contacted molybdenum disulfide
• Proximity induced spin-valley polarization in silicene/germanene on F-doped WS${}_2$