739 citations · 763 across the 5 of their papers we have counts for
5 papers
Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
Soumen Kar, Conan Weiland, Chenyu Zhou +16
A major roadblock to scalable quantum computing is phase decoherence and energy relaxation caused by qubits interacting with defect-related two-level systems (TLS). Native oxides p…
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski +9
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is t…
Atomic-Scale Defect Detection by Nonlinear Light Scattering and Localization
Farbod Shafiei, Tommaso Orzali, Alexey Vert +6
Hetero-epitaxial crystalline films underlie many electronic and optical technologies but are prone to forming defects at their hetero-interfaces. Atomic-scale defects such as threa…
Chloride Molecular Doping Technique on 2D Materials: WS2 and MoS2
Lingming Yang, Kausik Majumdar, Han Liu +8
Low-resistivity metal-semiconductor (M-S) contact is one of the urgent challenges in the research of 2D transition metal dichalcogenides (TMDs). Here, we report a chloride molecula…
High-Performance MoS2 Field-Effect Transistors Enabled by Chloride Doping: Record Low Contact Resistance (0.5 kohm*um) and Record High Drain Current (460 uA/um)
Lingming Yang, Kausik Majumdar, Yuchen Du +8
In this paper, we report a novel chemical doping technique to reduce the contact resistance (Rc) of transition metal dichalcogenides (TMDs) - eliminating two major roadblocks (name…