Cavity optomechanics with stoichiometric SiN films

Abstract

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor $Q_m$ and frequency ${\nu }_m$ reaching $Q_m{\nu }_m\simeq 2\times 10^{13}$ Hz. The SiN membranes exhibit a low optical absorption characterized by Im$(n)\lesssim 10^{-5}$ at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

4 pages, 5 figures

References in corpus (14)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Quantum Theory of Cavity-Assisted Sideband Cooling of Mechanical Motion
• Theory of ground state cooling of a mechanical oscillator using dynamical back-action
• Observation of strong coupling between a micromechanical resonator and an optical cavity field
• Resolved Sideband Cooling of a Micromechanical Oscillator
• Ground-state cooling of a micromechanical oscillator: generalized framework for cold damping and cavity-assisted cooling schemes
• Dispersive optomechanics: a membrane inside a cavity
• High quality mechanical and optical properties of commercial silicon nitride membranes
• Strong coupling of a mechanical oscillator and a single atom
• Bose-Einstein condensate coupled to a nanomechanical resonator on an atom chip
• Establishing EPR-channels between Nanomechanics and Atomic Ensembles
• Integration of fiber coupled high-Q silicon nitride microdisks with atom chips
• Simultaneous cooling and entanglement of mechanical modes of a micromirror in an optical cavity
• Thermoelastic relaxation in elastic structures with applications to thin plates

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