Microfabrication of large area high-stress silicon nitride membranes for optomechanical devices

Abstract

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN${}_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN${}_x$ membranes were fabricated and used as optomechanical resonators in a Michelson interferometer and in a Fabry-Pérot cavity. The measurements show that the fabrication process preserves both the optical quality and the mechanical quality factor of the membrane.

References in corpus (15)

• Cavity Optomechanics
• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
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• Observation of Radiation Pressure Shot Noise on a Macroscopic Object
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• Probing deformed commutators with macroscopic harmonic oscillators
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• Material loss angles from direct measurements of broadband thermal noise

Cited by in corpus (19)

• MEMS-tunable dielectric metasurface lens
• Enhancing sideband cooling by feedback--controlled light
• Two-membrane cavity optomechanics
• High-finesse Fabry-Perot cavities with bidimensional Si${}_3$N${}_4$ photonic-crystal slabs
• Normal--mode splitting in a weakly coupled optomechanical system
• Cavity Optomechanics with Photonic Bound States in the Continuum
• Enhancement of three-mode optomechanical interaction by feedback-controlled light
• Quantum signature of a squeezed mechanical oscillator
• Control of Recoil Losses in Nanomechanical SiN Membrane Resonators
• Silicon-nitride nanosensors toward room temperature quantum optomechanics
• Calibrated quantum thermometry in cavity optomechanics
• Probing quantum gravity effects with quantum mechanical oscillators
• Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics
• Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride
• Quantum motion of a squeezed mechanical oscillator attained via a optomechanical experiment
• Universal length dependence of tensile stress in nanomechanical string resonators
• Coupled Mode Theory of Optomechanical Crystals
• Amplitude and phase noise in Two-membrane cavity optomechanics
• Active feedback cooling of a SiN membrane resonator by electrostatic actuation