Control of Material Damping in High-Q Membrane Microresonators

Abstract

We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes over a large range of frequencies. We develop a theoretical model that interprets our results and predicts the damping can be reduced significantly by patterning the metal film. Using such patterning, we fabricate Al-Si3N4 membranes with ultrahigh Q at room temperature. Our work elucidates the role of material loss in the Q of membrane resonators and informs the design of hybrid mechanical oscillators for optical-electrical-mechanical quantum interfaces.

References in corpus (9)

• Sideband Cooling Micromechanical Motion to the Quantum Ground State
• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Quantum Theory of Cavity-Assisted Sideband Cooling of Mechanical Motion
• Theory of ground state cooling of a mechanical oscillator using dynamical back-action
• High quality mechanical and optical properties of commercial silicon nitride membranes
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• Laser cooling and optical detection of excitations in a LC electrical circuit
• High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling
• Spectroscopy of mechanical dissipation in micro-mechanical membranes

Cited by in corpus (77)

• Bidirectional and efficient conversion between microwave and optical light
• Optical detection of radio waves through a nanomechanical transducer
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator
• Reversible optical to microwave quantum interface
• Nanomechanical Resonators: Toward Atomic Scale
• Mesoscopic physics of nanomechanical systems
• Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
• Dissipation in ultrahigh quality factor SiN membrane resonators
• The thermal conductivity of silicon nitride membranes is not sensitive to stress
• A phononic bandgap shield for high-Q membrane microresonators
• Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature
• Generalized dissipation dilution in strained mechanical resonators
• Strained crystalline nanomechanical resonators with ultralow dissipation
• Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning
• Quantum Electromechanics on Silicon Nitride Nanomembranes
• Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding $10^8$
• Membrane-based scanning force microscopy
• Hierarchical tensile structures with ultralow mechanical dissipation
• Macroscopic tunneling of a membrane in an optomechanical double-well potential
• Cavity optomechanics with Si3N4 membranes at cryogenic temperatures
• Near-field integration of a SiN nanobeam and a SiO${}_2$ microcavity for Heisenberg-limited displacement sensing
• Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics
• Frequency and Q-factor control of nanomechanical resonators
• Analysis of membrane phononic crystals with wide bandgaps and low-mass defects
• Nanomechanical Dissipation and Strain Engineering
• Microfabrication of large area high-stress silicon nitride membranes for optomechanical devices
• Fractal-like mechanical resonators with soft-clamped fundamental mode
• Nanomechanical resonators with ultra-high-$Q$ perimeter modes
• Multimode Optomechanics as a Prototype of Mediated Interactions
• Graphene on silicon nitride for optoelectromechanical micromembrane resonators
• Signatures of two-level defects in the temperature-dependent damping of nanomechanical silicon nitride resonators
• High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2
• Centimeter-scale nanomechanical resonators with low dissipation
• Stress control of tensile-strained In${}_{1-x}$Ga${}_x$P nanomechanical string resonators
• Strain-dependent damping in nanomechanical resonators from thin $\mathrm{Mo}{\mathrm{S}}_2$ crystals
• Effect of oxygen plasma on nanomechanical silicon nitride resonators
• Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators
• Soft-clamped phononic dimers for mechanical sensing and transduction
• Tensile strained $I{n}_{x}G{a}_{1-x}P$ membranes for cavity optomechanics
• Simultaneous Electrical and Optical Readout of Graphene-Coated High Q Silicon Nitride Resonators
• Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
• Detecting solar chameleons through radiation pressure
• Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator
• Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration
• Control of Recoil Losses in Nanomechanical SiN Membrane Resonators
• Nested Trampoline Resonators for Optomechanics
• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
• Evidence for structural damping in a high-stress silicon nitride nanobeam and its implications for quantum optomechanics
• High-Q silicon nitride drum resonators strongly coupled to gates
• Sympathetic cooling of a radio-frequency LC circuit to its ground state in an optoelectromechanical system
• Nonreciprocal conversion between radio-frequency and optical photons with an optoelectromechanical system
• Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator
• Ground-state cooling of multiple near-degenerate mechanical modes
• Quantum magnetomechanics: towards the ultra-strong coupling regime
• Silicon-nitride nanosensors toward room temperature quantum optomechanics
• Suspended mid-infrared waveguides for Stimulated Brillouin Scattering
• Stopping and reversing sound via dynamic dispersion tuning in a phononic metamaterial
• Damping of metallized bilayer nanomechanical resonators at room temperature
• Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics
• Quantum Sticking of Atoms on Membranes
• Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
• Self-calibrating gas pressure sensor with a 10-decade measurement range
• Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications
• Optomechanical microwave amplification without mechanical amplification
• High-Q nested resonator in an actively stabilized optomechanical cavity
• Scattering theory from artificial piezoelectric-like meta-atoms and molecules
• Mode-Dependent Scaling of Nonlinearity and Linear Dynamic Range in a NEMS Resonator
• Edge mode engineering for optimal ultracoherent silicon nitride membranes
• Ultra-coherent nanomechanical resonators based on inverse design
• Nano-beam clamping revisited
• Quantum and thermal fluctuations of a thin elastic plate
• Spatial mapping of intrinsic and readout nonlinearities in a strongly-driven micromechanical membrane
• High-$Q$ membrane resonators using ultra-high-stress crystalline TiN films
• Casimir probe based upon metallized high Q SiN nanomembrane resonator
• Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators
• Swept-Frequency Drumhead Mechanical Resonators