Quantum Electromechanics on Silicon Nitride Nanomembranes

Abstract

We present a platform based upon silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Utilizing tensile stress and lithographic patterning of a silicon nitride nanomembrane we are able to reliably realize planar capacitors with vacuum gap sizes down to $s\approx 80$nm. In combination with spiral inductor coils of micron pitch, this yields microwave ($\approx 8$GHz) resonant circuits of high impedance ($Z_0\approx 3.4$k$\Omega$) suitable for efficient electromechanical coupling to nanoscale acoustic structures. We measure an electromechanical vacuum coupling rate of $g_0/2\pi =41.5$~Hz to the low frequency ($4.48$MHz) global beam motion of a patterned phononic crystal nanobeam, and through parametric microwave driving reach a backaction cooled mechanical mode occupancy as low as $n_m=0.58$.

21 pages, 9 figures

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• Antibunched photons emitted by a dc biased Josephson junction
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• Figures of merit for quantum transducers
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• Perspectives on high-frequency nanomechanics, nanoacoustics, and nanophononics
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• The Vacua of Dipolar Cavity Quantum Electrodynamics
• Prospects for observing gravitational forces between nonclassical mechanical oscillators
• Optomechanical characterization of silicon nitride membrane arrays
• Spatially Adiabatic Frequency Conversion in Optoelectromechanical Arrays
• Strong negative nonlinear friction from induced two-phonon processes in vibrational systems
• Combined feedback and sympathetic cooling of a mechanical oscillator coupled to ultracold atoms
• Effects of pressure on suspended micromechanical membrane arrays
• Electro-optomechanical equivalent circuits for quantum transduction
• Dual Shapiro steps of a phase-slip junction in the presence of a parasitic capacitance
• Efficient microwave frequency conversion mediated by the vibrational motion of a silicon nitride nanobeam oscillator
• Radio-frequency optomechanical characterization of a silicon nitride drum
• Degeneracy-breaking and Long-lived Multimode Microwave Electromechanical Systems Enabled by Cubic Silicon-Carbide Membrane Crystals
• Quantum Properties of the radiation emitted by a conductor in the Coulomb Blockade Regime
• Compact vacuum gap transmon qubits: Selective and sensitive probes for superconductor surface losses
• High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining
• Annealing reduces Si${}_3$N${}_4$ microwave-frequency dielectric loss in superconducting resonators
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• Electromechanics in vertically coupled nanomembranes
• Dynamically creating tripartite resonance and dark modes in a multimode optomechanical system
• Kinetic Inductive Electromechanical Transduction for Nanoscale Force Sensing
• Synchronization of a superconducting qubit to an optical field mediated by a mechanical resonator
• Ultrastrong coupling circuit QED in the radio-frequency regime
• Mechanical mode engineering with orthotropic metamaterial membranes
• Performance of Superconducting Resonators Suspended on SiN Membranes
• Quantum defects from single surface exhibit strong mutual interactions
• Cavity Optomechanical Probe of Gravity Between Massive Mechanical Oscillators
• Quantum and thermal fluctuations of a thin elastic plate
• Photonic crystal cavities based on suspended yttrium iron garnet nanobeams
• Single-photon quantum regime of artificial radiation pressure on a surface acoustic wave resonator