Effects of pressure on suspended micromechanical membrane arrays
arXiv:1710.00043 · doi:10.1063/1.5004261
Abstract
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode mechanical resonant frequencies and damping with air pressure are determined by means of optical interferometry. A kinetic damping linear friction force and a positive resonant frequency shift due to the compression of the fluid between the membranes are observed to be proportional with pressure in the range 0.01-10 mbars. For resonators with near-degenerate modes hybridization of the modes due to this squeeze film effect is also observed and well accounted for by a simple spring-coupled oscillator model.
arXiv comment4 pages, 3 figures
References in corpus (14)
- Cavity Optomechanics
- Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
- Bidirectional and efficient conversion between microwave and optical light
- Optical detection of radio waves through a nanomechanical transducer
- Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
- Strong coupling and long-range collective interactions in optomechanical arrays
- Quantum back action evading measurement of motion in a negative mass reference frame
- Reconfigurable long-range phonon dynamics in optomechanical arrays
- Quantum Electromechanics on Silicon Nitride Nanomembranes
- Non-invasive detection of animal nerve impulses with an atomic magnetometer operating near quantum limited sensitivity
- Heat transport in harmonic oscillator systems with correlated baths: Application to optomechanical arrays
- Optomechanical characterization of silicon nitride membrane arrays
- Hybrid cavity mechanics with doped systems
- Light-matter interactions in multi-element resonators
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- Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes
- Electromechanics in vertically coupled nanomembranes
- Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures