Propagation and imaging of mechanical waves in a highly-stressed single-mode phononic waveguide

Abstract

We demonstrate a single-mode phononic waveguide that enables robust propagation of mechanical waves. The waveguide is a highly-stressed silicon nitride membrane that supports the propagation of out-of-plane modes. In direct analogy to rectangular microwave waveguides, there exists a band of frequencies over which only the fundamental mode is allowed to propagate, while multiple modes are supported at higher frequencies. We directly image the mode profiles using optical heterodyne vibration measurement, showing good agreement with theory. In the single-mode frequency band, we show low-loss propagation ($\sim 1$~dB/cm) for a $\sim 5$~MHz mechanical wave. This design is well suited for phononic circuits interconnecting elements such as non-linear resonators or optomechanical devices for signal processing, sensing or quantum technologies.

arXiv comment6 pages, 5 figures

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• Nanomechanical Dissipation and Strain Engineering
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• A soft-clamped topological waveguide for phonons
• Tunnelling of transverse acoustic waves on a silicon chip
• Efficient optomechanical mode-shape mapping of micromechanical devices
• Directional emission in an on-chip acoustic waveguide
• Buckling-induced quadratic nonlinearity in silicon phonon waveguide structures