Efficient optomechanical mode-shape mapping of micromechanical devices

Abstract

We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock-loop, is demonstrated on a silicon nitride membrane and compared with three different approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality enables us to determine the weights of individual contributions in superpositions of degenerate modes.