Electromechanics in vertically coupled nanomembranes
arXiv:1905.00688 · doi:10.1063/1.5108788
Abstract
We investigate the electromechanical actuation of a pair of suspended silicon nitride membranes forming a monolithic optomechanical array. By controlling the membrane resonators' tensile stress via a piezoelectrically controlled compressive force applied to the membrane chip we demonstrate noninvasive tuning of their mechanical mode spectrum, as well as strong intermode electromechanical coupling. Piezoelectric actuation is also shown to enhance the nonlinear response of the membranes, which is evidenced either by parametric amplification of the fundamental mode thermal fluctuations or by resonant driving of these modes into high amplitude states. Such an electro-optomechanical membrane array represents an attractive tunable and versatile platform for sensing, photonics and optomechanics applications.
arXiv comment6 pages, 5 figures
References in corpus (37)
- Cavity Optomechanics
- Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
- Topological energy transfer in an optomechanical system with exceptional points
- Bidirectional and efficient conversion between microwave and optical light
- Optical detection of radio waves through a nanomechanical transducer
- Measurement-based quantum control of mechanical motion
- Strong Optomechanical Squeezing of Light
- Observation of Radiation Pressure Shot Noise on a Macroscopic Object
- Coherent phonon manipulation in coupled mechanical resonators
- Steady state entanglement in the mechanical vibrations of two dielectric membranes
- Cavity optomechanics with stoichiometric SiN films
- Nano-Opto-Electro-Mechanical Systems
- Synchronization of two anharmonic nanomechanical oscillators
- Strong coupling and long-range collective interactions in optomechanical arrays
- Laser cooling of a micromechanical membrane to the quantum backaction limit
- Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
- Coherent control of a nanomechanical two-level system
- Multiple membrane cavity optomechanics
- Measurement of the motional sidebands of a nanogram-scale oscillator in the quantum regime
- Two-membrane cavity optomechanics
- Two-mode squeezing in an electromechanical resonator
- Reconfigurable long-range phonon dynamics in optomechanical arrays
- Synchronization dynamics of two nanomechanical membranes within a Fabry-Perot cavity
- Quantum Electromechanics on Silicon Nitride Nanomembranes
- Dynamical two-mode squeezing of thermal fluctuations in a cavity opto-mechanical system
- Integrated optomechanical arrays of two high reflectivity SiN membranes
- Parametric oscillation, frequency mixing and injection locking of strongly coupled nanomechanical resonator modes
- A controllable two-membrane-in-the-middle cavity optomechanical system
- Sensitivity-bandwidth limit in a multi-mode opto-electro-mechanical transducer
- Optically mediated nonlinear quantum optomechanics
- Superradiance and collective gain in multimode optomechanics
- Spatial modulation of nonlinear flexural vibrations of membrane resonators
- Optomechanical characterization of silicon nitride membrane arrays
- Integrated optical force sensors using focusing photonic crystal arrays
- Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator
- Cavity optomechanics with arrays of thick dielectric membranes
- Effects of pressure on suspended micromechanical membrane arrays
Cited by in corpus (7)
- Noise robustness of synchronization of two nanomechanical resonators coupled to the same cavity field
- Two-membrane cavity optomechanics: non-linear dynamics
- Quench Dynamics in 1D Optomechanical Arrays
- Membrane sandwich squeeze film pressure sensors
- Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity
- Squeeze film absolute pressure sensors with sub-millipascal sensitivity
- Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes