Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
arXiv:1511.01769 · doi:10.1103/PhysRevX.6.021001
Abstract
In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here we report wafer-scale batch fabrication and characterization of high-aspect-ratio, nanogram-scale SiN "trampolines" having quality factors above and ringdown times exceeding five minutes (1 mHz linewidth). We measure a thermally limited force noise sensitivity of 16.20.8 aN/Hz at room temperature, with a spring constant (1 N/m) 2-5 orders of magnitude larger than those of competing technologies. We also characterize the suitability of these devices for high-finesse cavity readout and optomechanics applications, finding no evidence of surface or bulk optical losses from the processed nitride in a cavity achieving finesse 40,000. These parameters provide access to a single-photon cooperativity in the resolved-sideband limit, wherein a variety of outstanding optomechanics goals become feasible.
8 pages, 4 figures, 1 table
References in corpus (14)
- Sideband Cooling Micromechanical Motion to the Quantum Ground State
- Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
- Quantum Theory of Cavity-Assisted Sideband Cooling of Mechanical Motion
- Theory of ground state cooling of a mechanical oscillator using dynamical back-action
- Observation of Radiation Pressure Shot Noise on a Macroscopic Object
- Dispersive optomechanics: a membrane inside a cavity
- Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
- Nanotube mechanical resonators with quality factors of up to 5 million
- Laser cooling of a micromechanical membrane to the quantum backaction limit
- High quality mechanical and optical properties of commercial silicon nitride membranes
- Standard Quantum Limit for Probing Mechanical Energy Quantization
- Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding
- From membrane-in-the-middle to mirror-in-the-middle with a high-reflectivity sub-wavelength grating
- Enhanced Optomechanical Levitation of Minimally Supported Dielectrics
Cited by in corpus (113)
- Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
- Zeptonewton force sensing with nanospheres in an optical lattice
- Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
- Mesoscopic physics of nanomechanical systems
- Faithful conversion of propagating quantum information to mechanical motion
- Feedback cooling of a room temperature mechanical oscillator close to its motional groundstate
- Single-Spin Magnetomechanics with Levitated Micromagnets
- Acceleration sensing with magnetically levitated oscillators above a superconductor
- Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning
- Ultrasensitive Displacement Noise Measurement of Carbon Nanotube Mechanical Resonators
- Membrane-based scanning force microscopy
- Hierarchical tensile structures with ultralow mechanical dissipation
- Integrated optomechanical arrays of two high reflectivity SiN membranes
- Theory of Quantum Acoustomagnonics and Acoustomechanics with a Micromagnet
- Ultralight dark matter detection with mechanical quantum sensors
- Quantum Acoustomechanics with a Micromagnet
- Micromechanical bolometers for sub-Terahertz detection at room temperature
- Spin detection with a micromechanical trampoline: Towards magnetic resonance microscopy harnessing cavity optomechanics
- Resolved Sideband Cooling of a Levitated Nanoparticle in the Presence of Laser Phase Noise
- Giant Tunable Mechanical Nonlinearity in Graphene-Silicon Nitride Hybrid Resonator
- Analysis of membrane phononic crystals with wide bandgaps and low-mass defects
- Strong Coupling between a Single NV Spin and the Rotational Mode of Diamonds Levitating in an Ion Trap
- Nanomechanical Dissipation and Strain Engineering
- Nanoladder cantilevers made from diamond and silicon
- Energy localization enhanced ground-state cooling of mechanical resonator from room temperature in optomechanics using a gain cavity
- Hybrid quantum systems with trapped charged particles
- Fractal-like mechanical resonators with soft-clamped fundamental mode
- Engineering the dissipation of crystalline micromechanical resonators
- Motion transduction with thermo-mechanically squeezed graphene resonator modes
- Nanomechanical resonators with ultra-high- perimeter modes
- Clamp-tapering increases the quality factor of stressed nanobeams
- Probing a Gravitational Cat State: Experimental Possibilities
- Quantum backaction and noise interference in asymmetric two-cavity optomechanical systems
- Cavity nano-optomechanics in the ultrastrong coupling regime with ultrasensitive force sensors
- Cavity Mode Frequencies and Strong Optomechanical Coupling in Two-Membrane Cavity Optomechanics
- Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
- Antibunching in an optomechanical oscillator
- Laser cooling a membrane-in-the-middle system close to the quantum ground state from room temperature
- Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators
- Effect of oxygen plasma on nanomechanical silicon nitride resonators
- Modelling and observation of nonlinear damping in dissipation-diluted nanomechanical resonators
- Enhancing a slow and weak optomechanical nonlinearity with delayed quantum feedback
- Thermal intermodulation noise in cavity-based measurements
- Combined feedback and sympathetic cooling of a mechanical oscillator coupled to ultracold atoms
- Reservoir engineering of bosonic lattices using chiral symmetry and localized dissipation
- Spin detection via parametric frequency conversion in a membrane resonator
- Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
- Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator
- Optomechanical Detection of Light with Orbital Angular Momentum
- Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators
- Optical spatial differentiation with suspended subwavelength gratings
- Towards cavity-free ground state cooling of an acoustic-frequency silicon nitride membrane
- High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
- Dynamical backaction in an ultrahigh-finesse fiber-based microcavity
- Flexure-Tuned Membrane-at-the-Edge Optomechanical System
- Cavity optomechanics with arrays of thick dielectric membranes
- Converting the signal-recycling cavity into an unstable optomechanical filter to enhance the detection bandwidth of gravitational-wave detectors
- Strong parametric coupling between two ultra-coherent membrane modes
- Stroboscopic quantum optomechanics
- Recent Advances in Mechanical Torque Studies of Small-scale Magnetism
- Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators
- Phonon Interferometry for Measuring Quantum Decoherence
- Magnetic Resonance Force Detection using a Membrane Resonator
- Optomechanically induced optical responses with non-rotating wave approximation
- Thermal transport and frequency response of localized modes on low-stress nanomechanical silicon nitride drums featuring a phononic bandgap structure
- Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector
- Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics
- Critical quantum fluctuations and photon antibunching in optomechanical systems with large single-photon cooperativity
- Membrane sandwich squeeze film pressure sensors
- Coupling of Light and Mechanics in a Photonic Crystal Waveguide
- Entangling distant solid-state spins via thermal phonons
- Optical response of a dual membrane active-passive optomechanical cavity
- Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride
- Quantum signatures in quadratic optomechanics
- Towards a Room-Temperature Spin-Photon Interface based on Nitrogen-Vacancy centers and Optomechanics
- Universal length dependence of tensile stress in nanomechanical string resonators
- Self-calibrating gas pressure sensor with a 10-decade measurement range
- Electromechanics in vertically coupled nanomembranes
- Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing
- Nonclassical mechanical states in cavity optomechanics in the single-photon strong-coupling regime
- Optically Defined Mechanical Geometry
- Scalable nuclear-spin entanglement mediated by a mechanical oscillator
- Long-range optomechanical interactions in SiN membrane arrays
- Force-detected Magnetic Resonance Imaging of Influenza Viruses in the Overcoupled Sensor Regime
- Geometric energy transfer in a Stückelberg interferometer of two parametrically coupled mechanical modes
- Narrow-linewidth Fano microcavities with resonant subwavelength grating mirror
- Dissipation-driven nonclassical state generation in optomechanics with squeezed light
- Current experimental upper bounds on spacetime diffusion
- Multistability of globally coupled Duffing oscillators
- Parametric amplification of light in a cavity with a moving dielectric membrane: Landau-Zener problem for the Maxwell field
- Energy exchange in globally coupled mechanical phase oscillators
- Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
- A cavity optomechanical locking scheme based on the optical spring effect
- Ultra-coherent nanomechanical resonators based on inverse design
- Injection locking of a levitated optomechanical oscillator for precision force sensing
- Polarization-independent optical spatial differentiation with a doubly-resonant one-dimensional guided-mode grating
- Gibbs mixing of partially distinguishable photons with a polarising beamsplitter membrane
- Accurate, precise pressure sensing with tethered optomechanics
- Light-matter interactions in multi-element resonators
- Observation of photon-phonon correlations via dissipative filtering
- Near-resonant nuclear spin detection with megahertz mechanical resonators
- Highly sensitive temperature sensing via quadratic optomechanical coupling
- Highly reflective and high- thin resonant subwavelength gratings
- High- membrane resonators using ultra-high-stress crystalline TiN films
- Active feedback cooling of a SiN membrane resonator by electrostatic actuation
- Etch-Tuning and Design of Silicon Nitride Photonic Crystal Reflectors
- Route to hyperchaos in quadratic optomechanics
- Quantum Zeno blockade in optomechanical systems
- Soft-clamped silicon nitride string resonators at millikelvin temperatures
- Quantum Shape Effects
- Optical microcavity with a pair of suspended resonant mirrors
- Cavity-enhanced absorption sensing with robust sideband locking
- Collimation and finite-size effects in suspended resonant guided-mode gratings