Soft-clamped silicon nitride string resonators at millikelvin temperatures

Abstract

We demonstrate that soft-clamped silicon nitride strings with large aspect ratio can be operated at \si{\milli\kelvin} temperatures. The quality factors ($Q$) of two measured devices show consistent dependency on the cryostat temperature, with soft-clamped mechanical modes reaching $Q>10^9$ at $46\mathrm{mK}$. For low optical readout power, $Q$ is found to saturate, indicating good thermalization between the sample and the stage it is mounted on. Our best device exhibits a force sensitivity of $9.6\mathrm{zN}/\sqrt{\mathrm{Hz}}$ and a thermal decoherence time of $0.38\mathrm{s}$ which bode well for future applications such as nanomechanical force sensing and beyond.

References in corpus (37)

• Cavity Optomechanics
• Bidirectional and efficient conversion between microwave and optical light
• Optical detection of radio waves through a nanomechanical transducer
• Measurement-based quantum control of mechanical motion
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Ultrasensitive force detection with a nanotube mechanical resonator
• Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million
• Measurement and control of a mechanical oscillator at its thermal decoherence rate
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• Measuring nanomechanical motion with an imprecision far below the standard quantum limit
• Force-detected nuclear magnetic resonance: Recent advances and future challenges
• Entanglement between Distant Macroscopic Mechanical and Spin Systems
• Feedback cooling of a room temperature mechanical oscillator close to its motional groundstate
• Light-mediated strong coupling between a mechanical oscillator and atomic spins one meter apart
• Generalized dissipation dilution in strained mechanical resonators
• Surface dissipation in nanoelectromechanical systems: Unified description with the standard tunneling model and effects of metallic electrodes
• Strained crystalline nanomechanical resonators with ultralow dissipation
• Ultrasensitive Displacement Noise Measurement of Carbon Nanotube Mechanical Resonators
• Ground State Cooling of an Ultracoherent Electromechanical System
• Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding $10^8$
• Membrane-based scanning force microscopy
• Hierarchical tensile structures with ultralow mechanical dissipation
• Frequency and phase noise of ultra-high Q silicon nitride nanomechanical resonators
• Quantum Friction in Nanomechanical Oscillators at Millikelvin Temperatures
• Near-field integration of a SiN nanobeam and a SiO${}_2$ microcavity for Heisenberg-limited displacement sensing
• Spin detection with a micromechanical trampoline: Towards magnetic resonance microscopy harnessing cavity optomechanics
• Analysis of membrane phononic crystals with wide bandgaps and low-mass defects
• Gravitational wave detectors with broadband high frequency sensitivity
• Vibration-induced electrical noise in a cryogen-free dilution refrigerator: characterization, mitigation, and impact on qubit coherence
• Nanoladder cantilevers made from diamond and silicon
• Magnetic resonance force microscopy with a one-dimensional resolution of 0.9 nanometers
• Evidence of universality in the dynamical response of micromechanical diamond resonators at millikelvin temperatures
• Two-Level System Damping in a Quasi-One-Dimensional Optomechanical Resonator
• Spin detection via parametric frequency conversion in a membrane resonator
• Dimensional transformation of defect-induced noise, dissipation, and nonlinearity
• Evidence for the role of normal-state electrons in nanoelectromechanical damping mechanisms at very low temperatures
• Spatially resolved surface dissipation over metal and dielectric substrates

Cited by in corpus (1)

• Near-resonant nuclear spin detection with megahertz mechanical resonators