Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators

Abstract

Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities. In the present study, we investigate the thermal transport in nanomechanical SiN drum resonators by analytical modelling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response. Our analysis indicates that radiative heat loss is a non-negligible heat transfer mechanism in nanomechanical SiN resonators limiting their thermal responsivity and response time. This finding is important for optimal resonator designs for thermal sensing applications as well as cavity optomechanics.

arXiv comment8 pages, 4 figures in main text, 3 figures in supplementary

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Cited by in corpus (6)

• Frequency fluctuations in nanomechanical silicon nitride string resonators
• Thermal transport and frequency response of localized modes on low-stress nanomechanical silicon nitride drums featuring a phononic bandgap structure
• Demonstration of Frequency Stability limited by Thermal Fluctuation Noise in Silicon Nitride Nanomechanical Resonators
• Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride
• Photothermal responsivity of van der Waals material-based nanomechanical resonators
• Vibrational resonance amplification in a thermo-optic optomechanical nanocavity