25 citations · 25 across the 2 of their papers we have counts for
2 papers
physics.app-ph2020★ 25 cited
Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
Markus Piller, Pedram Sadeghi, Robert G. West +4
Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical qua…
physics.app-ph2019
Tunable MEMS VCSEL on Silicon substrate
Hitesh Kumar Sahoo, Thor Ansbæk, Luisa Ottaviano +4
We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by d…