Spectroscopy of mechanical dissipation in micro-mechanical membranes

Abstract

We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned reversibly by up to 40% through local heating with a laser. Several distinct resonances in Q are observed that can be explained by coupling to membrane frame modes. Away from the resonances, the background Q is independent of frequency and temperature in the measured range.

4 pages, 5 figures

References in corpus (5)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Minimization of phonon-tunneling dissipation in mechanical resonators
• Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap

Cited by in corpus (24)

• Cavity Optomechanics
• Strong coupling and long-range collective interactions in optomechanical arrays
• Observation of non-Markovian micro-mechanical Brownian motion
• Control of Material Damping in High-Q Membrane Microresonators
• Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
• Sympathetic cooling of a membrane oscillator in a hybrid mechanical-atomic system
• Dissipation in ultrahigh quality factor SiN membrane resonators
• A phononic bandgap shield for high-Q membrane microresonators
• Dissipative optomechanical preparation of macroscopic quantum superposition states
• Cavity optomechanics with Si3N4 membranes at cryogenic temperatures
• Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics
• A controllable two-membrane-in-the-middle cavity optomechanical system
• Opto-Nanomechanics Strongly Coupled to a Rydberg Superatom: Coherent vs. Incoherent Dynamics
• Frequency noise cancellation in optomechanical systems for ponderomotive squeezing
• Optomechanical laser cooling with mechanical modulations
• Deviation from the normal mode expansion in a coupled graphene-nanomechanical system
• Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
• Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator
• Control of Recoil Losses in Nanomechanical SiN Membrane Resonators
• Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes
• Optically Defined Mechanical Geometry
• Multimode optomechanical system in the quantum regime
• Spatial mapping of intrinsic and readout nonlinearities in a strongly-driven micromechanical membrane
• Mechanical dissipation by substrate-mode coupling in SiN resonators