Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

Abstract

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.

References in corpus (5)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Observation of Radiation Pressure Shot Noise on a Macroscopic Object
• Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
• Sympathetic cooling of a membrane oscillator in a hybrid mechanical-atomic system
• High-Q Nanomechanics via Destructive Interference of Elastic Waves

Cited by in corpus (7)

• Effect of oxygen plasma on nanomechanical silicon nitride resonators
• Silicon-nitride nanosensors toward room temperature quantum optomechanics
• Imaging correlations in heterodyne-detected spectra for quantum sensing
• Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications
• Amplitude and phase noise in Two-membrane cavity optomechanics
• Ultra-coherent nanomechanical resonators based on inverse design
• Active feedback cooling of a SiN membrane resonator by electrostatic actuation