Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

Abstract

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.

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• Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics
• Probing quantum gravity effects with quantum mechanical oscillators
• Quantum motion of a squeezed mechanical oscillator attained via a optomechanical experiment
• Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications
• Amplitude and phase noise in Two-membrane cavity optomechanics
• Ultra-coherent nanomechanical resonators based on inverse design
• Quantum and thermal fluctuations of a thin elastic plate
• Active feedback cooling of a SiN membrane resonator by electrostatic actuation