High-Q Nanomechanics via Destructive Interference of Elastic Waves

Abstract

Mechanical dissipation poses an ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test it on silicon nitride membranes with circular and square geometries. The measured Q-values of different harmonics present a non-monotonic behavior which is successfully explained. For azimuthal harmonics of the circular geometry we predict that destructive interference of the radiated waves leads to an exponential suppression of the clamping loss in the harmonic index. Our model can also be applied to graphene drums under high tension.

8 pages, 1 figure

References in corpus (4)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Nanomechanical motion measured with precision beyond the standard quantum limit
• Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
• Surface dissipation in nanoelectromechanical systems: Unified description with the standard tunneling model and effects of metallic electrodes

Cited by in corpus (5)

• Minimization of phonon-tunneling dissipation in mechanical resonators
• Casimir Force and In Situ Surface Potential Measurements on Nanomembranes
• Frequency and phase noise of ultra-high Q silicon nitride nanomechanical resonators
• High-Q Gold and Silicon Nitride Bilayer Nanostrings
• Casimir probe based upon metallized high Q SiN nanomembrane resonator