Efficient anchor loss suppression in coupled near-field optomechanical resonators

Abstract

Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of low-loss optomechanical devices. In this work we rely on the coherent cancellation of mechanical radiation to demonstrate material and surface absorption limited silicon near-field optomechanical resonators oscillating at tens of MHz. The effectiveness of our dissipation suppression scheme is investigated at room and cryogenic temperatures. While at room temperature we can reach a maximum quality factor of 7.61k ($fQ$-product of the order of $10^{11}$~Hz), at 22~K the quality factor increases to 37k, resulting in a $fQ$-product of $2\times 10^{12}$~Hz.

References in corpus (31)

• Cavity Optomechanics
• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity
• Near-field cavity optomechanics with nanomechanical oscillators
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Synchronization of Micromechanical Oscillators Using Light
• Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Quantum many-body dynamics in optomechanical arrays
• Optimized optomechanical crystal cavity with acoustic radiation shield
• Strong coupling and long-range collective interactions in optomechanical arrays
• Determination of the vacuum optomechanical coupling rate using frequency noise calibration
• Synchronization and Phase Noise Reduction in Micromechanical Oscillators Arrays Coupled through Light
• Minimization of phonon-tunneling dissipation in mechanical resonators
• High-sensitivity monitoring of micromechanical vibration using optical whispering gallery mode resonators
• High sensitivity optomechanical reference accelerometer over 10 kHz
• Synchronization of many nano-mechanical resonators coupled via a common cavity field
• Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator
• Measuring the role of surface chemistry in silicon microphotonics
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• Reconfigurable long-range phonon dynamics in optomechanical arrays
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• Femtogram Doubly Clamped Nanomechanical Resonators Embedded in a High-Q Two-Dimensional Photonic Crystal Nanocavity
• Nanoscale Torsional Optomechanics
• Multidimensional optomechanical cantilevers for high frequency atomic force microscopy
• Integrated tuning fork nanocavity optomechanical transducers with high $f_M{Q}_M$ product and stress-engineered frequency tuning
• Hybrid confinement of optical and mechanical modes in a bullseye optomechanical resonator
• Eliminating Structural Loss in Optomechanical Resonators Using Elastic Wave Interference
• Ultrahigh-Q optomechanical crystals cavities fabricated on a CMOS foundry
• Optomechanical Transductions in Single and Coupled Wheel Resonators

Cited by in corpus (2)

• A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots
• Ar/Cl${}_2$ etching of GaAs optomechanical microdisks fabricated with positive electroresist