Integrated tuning fork nanocavity optomechanical transducers with high $f_M{Q}_M$ product and stress-engineered frequency tuning

Abstract

Cavity optomechanical systems are being widely developed for precision force and displacement measurements. For nanomechanical transducers, there is usually a trade-off between the frequency ($f_M$) and quality factor ($Q_M$), which limits temporal resolution and sensitivity. Here, we present a monolithic cavity optomechanical transducer supporting both high $f_M$ and high $Q_M$. By replacing the common doubly-clamped, Si${}_3$N${}_4$ nanobeam with a tuning fork geometry, we demonstrate devices with the fundamental $f_M\approx 29$ MHz and $Q_M\approx 2.2$$\times 10^5$, corresponding to an $f_M{Q}_M$ product of 6.35$\times 10^{12}$ Hz, comparable to the highest values previously demonstrated for room temperature operation. This high $f_M{Q}_M$ product is partly achieved by engineering the stress of the tuning fork to be 3 times the residual film stress through clamp design, which results in an increase of $f_M$ up to 1.5 times. Simulations reveal that the tuning fork design simultaneously reduces the clamping, thermoelastic dissipation, and intrinsic material damping contributions to mechanical loss. This work may find application when both high temporal and force resolution are important, such as in compact sensors for atomic force microscopy.

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Cited by in corpus (5)

• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Generalized dissipation dilution in strained mechanical resonators
• Clamp-tapering increases the quality factor of stressed nanobeams
• Integrated tuning fork nanocavity optomechanical transducers with high $f_M{Q}_M$ product and stress-engineered frequency tuning
• Efficient anchor loss suppression in coupled near-field optomechanical resonators