Ultrahigh-Q optomechanical crystals cavities fabricated on a CMOS foundry

Abstract

Photonic crystals use periodic structures to create forbidden frequency regions for optical wave propagation, that allow for the creation and integration of complex optical functions in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves and to explore their interaction with light in the so-called optomechanical cavities. Because of their challenging design, these cavities are traditionally fabricated using dedicated high-resolution electron-beam lithography tools that are inherently slow, limiting this solution to small-scale applications or research. Here we show how to overcome this problem by using a deep-UV photolithography process to fabricate optomechanical crystals on a commercial CMOS foundry. We show that a careful design of the photonic crystals can withstand the limitations of the photolithography process, producing cavities with measured intrinsic optical quality factors as high as $Q_i=(1.21\pm 0.02)\times 10^6$. Optomechanical crystals are also created using phononic crystals to tightly confine the sound waves within the optical cavity that results in a measured vacuum optomechanical coupling rate of $g_0=2\pi \times (91\pm 4)$ kHz. Efficient sideband cooling and amplification are also demonstrated since these cavities are in the resolved sideband regime. Further improvement in the design and fabrication process suggest that commercial foundry-based optomechanical cavities could be used for quantum ground-state cooling.

arXiv comment10 pages, 5 figures

References in corpus (11)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• A microchip optomechanical accelerometer
• Non-classical correlations between single photons and phonons from a mechanical oscillator
• Synchronization of Micromechanical Oscillators Using Light
• Optimized optomechanical crystal cavity with acoustic radiation shield
• Dynamic manipulation of mechanical resonators in the high amplitude regime through optical backaction
• Design of Optomechanical Cavities and Waveguides on a Simultaneous Bandgap Phononic-Photonic Crystal Slab
• Dissipative and Dispersive Optomechanics in a Nanocavity Torque Sensor
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset
• Highly efficient optical filter based on vertically coupled Photonic crystal cavity and bus waveguide

Cited by in corpus (11)

• Nano-Opto-Electro-Mechanical Systems
• Quasinormal-mode perturbation theory for dissipative and dispersive optomechanics
• Photonic Frequency Conversion of OFDM Microwave Signals in a Wavelength-Scale Optomechanical Cavity
• Designing of strongly confined short-wave Brillouin phonons in silicon waveguide periodic lattices
• Efficient anchor loss suppression in coupled near-field optomechanical resonators
• Ar/Cl${}_2$ etching of GaAs optomechanical microdisks fabricated with positive electroresist
• Silicon anisotropy in a bi-dimensional optomechanical cavity
• Effect of phonon coupling on cooperative two-photon emission from two-quantum dots
• Improved design and experimental demonstration of ultrahigh-Q C${}_{\text{6}}$-symmetric H1 hexapole photonic crystal nanocavities
• Low-noise Optomechanical Single Phonon-photon Conversion for Quantum Networks
• Photonic crystal cavities based on suspended yttrium iron garnet nanobeams