An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset

Abstract

High-quality frequency references are the cornerstones in position, navigation and timing applications of both scientific and commercial domains. Optomechanical oscillators, with direct coupling to continuous-wave light and non-material-limited f Q product, are long regarded as a potential platform for frequency reference in radio-frequency-photonic architectures. However, one major challenge is the compatibility with standard CMOS fabrication processes while maintaining optomechanical high quality performance. Here we demonstrate the monolithic integration of photonic crystal optomechanical oscillators and on-chip high speed Ge detectors based on the silicon CMOS platform. With the generation of both high harmonics (up to 59th order) and subharmonics (down to 1/4), our chipset provides multiple frequency tones for applications in both frequency multipliers and dividers. The phase noise is measured down to -125 dBc/Hz at 10 kHz offset at ~ 400 μW dropped-in powers, one of the lowest noise optomechanical oscillators to date and in room-temperature and atmospheric non-vacuum operating conditions. These characteristics enable optomechanical oscillators as a frequency reference platform for radio-frequency-photonic information processing.

arXiv comment32 pages, 13 figures

References in corpus (16)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity
• Controlling photonic structures using optical forces
• Parametric Normal-Mode Splitting in Cavity Optomechanics
• Two-dimensional phononic-photonic bandgap optomechanical crystal cavity
• Optomechanical coupling in a two-dimensional photonic crystal defect cavity
• Optomechanics in an ultrahigh-Q slotted 2D photonic crystal cavity
• Demonstration of an air-slot mode-gap confined photonic crystal slab nanocavity with ultrasmall mode volumes
• Stabilization of a linear nanomechanical oscillator to its ultimate thermodynamic limit
• A Monolithic Radiation-Pressure Driven, Low Phase Noise Silicon Nitride Opto-Mechanical Oscillator
• Design of dispersive optomechanical coupling and cooling in ultrahigh-Q/V slot-type photonic crystal cavities
• Parametric Optomechanical Oscillations in Two-Dimensional Slot-Type High-Q Photonic Crystal Cavities
• Stability of Resonant Opto-Mechanical Oscillators
• Feedback and harmonic locking of slot-type optomechanical oscillators to external low-noise reference clocks
• Phase Noise Modeling of Opto-Mechanical Oscillators

Cited by in corpus (13)

• Mesoscopic chaos mediated by Drude electron-hole plasma in silicon optomechanical oscillators
• Microwave generation and frequency comb in a silicon optomechanical cavity with a full phononic bandgap
• Laser Optomechanics
• Acoustic tests of Lorentz symmetry using quartz oscillators
• Optomechanical Synchronization across Multi-Octaves Frequency Spans
• Hybrid confinement of optical and mechanical modes in a bullseye optomechanical resonator
• Injection-locked phonon lasing driven by an individual plasmonic metamolecule
• Ultrahigh-Q optomechanical crystals cavities fabricated on a CMOS foundry
• Photonic Frequency Conversion of OFDM Microwave Signals in a Wavelength-Scale Optomechanical Cavity
• Experimental Evaluation of All-Optical Up- and Down-Conversion of 3GPP 5G NR Signals using an Optomechanical Crystal Cavity Frequency Comb
• Cascaded injection locking of optomechanical crystal oscillators
• Floquet phonon lasing in multimode optomechanical systems
• Testing optomechanical microwave oscillators for SATCOM application