High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2

Abstract

Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Prior to the study of their mechanical properties with a laser interferometer, we checked the oxidation and crystallinity of the freely-suspended tantalum oxide in a high-resolution electron microscope. We show that the stress of tantalum oxide resonators increase by 140 MPa (with respect to pristine TaSe2 resonators) which causes an enhancement of quality factor (14 times larger) and resonance frequency (9 times larger) of these resonators.

References in corpus (10)

• Selective Molecular Sieving through Porous Graphene
• Laser-thinning of MoS2: on demand generation of a single-layer semiconductor
• Damping of Nanomechanical Resonators
• Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
• Single-layer MoS2 mechanical resonators
• Control of Material Damping in High-Q Membrane Microresonators
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• Fast and reliable identification of atomically thin layers of TaSe2 crystals
• High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2
• Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Cited by in corpus (10)

• Graphene Squeeze-Film Pressure Sensors
• Young's modulus of 2D materials extracted from their nonlinear dynamic response
• Visualizing the motion of graphene nanodrums
• Dynamics of 2D Material Membranes
• Accurate Extraction of Schottky Barrier Height and Universality of Fermi Level De-pinning of van der Waals Contacts
• High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2
• Strain-dependent damping in nanomechanical resonators from thin $\mathrm{Mo}{\mathrm{S}}_2$ crystals
• Light emission from the layered metal 2H-TaSe${}_2$ and its potential applications
• Tunable Photodetectors via in situ Thermal Conversion of TiS${}_3$ to TiO${}_2$
• Study of charge density waves in suspended 2H-TaS2 and 2H-TaSe2 by nanomechanical resonance