Dissipation Mechanisms in Thermomechanically Driven Silicon Nitride Nanostrings

Abstract

High-stress silicon nitride nanostrings are a promising system for sensing applications because of their ultra-high mechanical quality factors (Qs). By performing thermomechanical calibration across multiple vibrational modes, we are able to assess the roles of the various dissipation mechanisms in these devices. Specifically, we possess a set of nanostrings in which all measured modes fall upon a single curve of peak displacement versus frequency. This allows us to rule out bulk bending and intrinsic loss mechanisms as dominant sources of dissipation and to conclude that the most significant contribution to dissipation in high-stress nanostrings occurs at the anchor points.

4 pages (+3 supplementary), 3 figures, accepted to Applied Physics Letters

References in corpus (7)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Nanomechanical motion measured with precision beyond the standard quantum limit
• Minimization of phonon-tunneling dissipation in mechanical resonators
• Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• Dissipation Mechanisms in Thermomechanically Driven Silicon Nitride Nanostrings

Cited by in corpus (10)

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• Nanoscale Torsional Optomechanics
• Dissipation Mechanisms in Thermomechanically Driven Silicon Nitride Nanostrings
• High-Q Gold and Silicon Nitride Bilayer Nanostrings
• Time-Resolved Mass Sensing of a Molecular Adsorbate Nonuniformly Distributed Along a Nanomechnical String
• Nano-beam clamping revisited
• On the link between mechanics and thermal properties: mechanothermics