Nano-beam clamping revisited
arXiv:2211.01617 · doi:10.1063/5.0137869
Abstract
Within recent years, the field of nano-mechanics has diversified in a variety of applications, ranging from quantum information processing to biological molecules recognition. Among the diversity of devices produced these days, the simplest (but versatile) element remains the doubly-clamped beam: it can store very large tensile stresses (producing high resonance frequencies and quality factors ), is interfaceable with electric setups (by means of conductive layers), and can be produced easily in clean rooms (with scalable designs including multiplexing). Besides, its mechanical properties are the simplest to describe. Resonance frequencies and s are being modeled, with as specific achievement the ultra-high quality resonances based on ``soft clamping'' and ``phonon shields''. Here, we demonstrate that the fabrication undercut of the clamping regions of basic nano-beams produces a ``natural soft clamping'', given for free. We present the analytic theory that enables to fit experimental data, which can be used for design: beyond Finite Element Modeling validation, the presented expressions provide a profound understanding of the phenomenon, with both a Q enhancement and a downwards frequency shift.
arXiv commentWith Supplementary Information
References in corpus (18)
- Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
- Elastic Wave Transmission at an Abrupt Junction in a Thin Plate, with Application to Heat Transport and Vibrations in Mesoscopic Systems
- Damping of Nanomechanical Resonators
- Mechanical On-Chip Microwave Circulator
- Control of Material Damping in High-Q Membrane Microresonators
- Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
- Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
- Single-particle Mass Spectrometry with arrays of frequency-addressed nanomechanical resonators
- The thermal conductivity of silicon nitride membranes is not sensitive to stress
- A phononic bandgap shield for high-Q membrane microresonators
- Generalized dissipation dilution in strained mechanical resonators
- Two-Level System Damping in a Quasi-One-Dimensional Optomechanical Resonator
- Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators
- Dissipation Mechanisms in Thermomechanically Driven Silicon Nitride Nanostrings
- Evidence for the role of normal-state electrons in nanoelectromechanical damping mechanisms at very low temperatures
- Universal length dependence of tensile stress in nanomechanical string resonators
- Nanomechanical damping via electron-assisted relaxation of two-level systems
- Fully suspended nano-beams for quantum fluids