Universal length dependence of tensile stress in nanomechanical string resonators

Abstract

We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.

References in corpus (28)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• A Mechanical Mass Sensor with Yoctogram Resolution
• Bidirectional and efficient conversion between microwave and optical light
• Measurement-based quantum control of mechanical motion
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Ultrasensitive force detection with a nanotube mechanical resonator
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Cavity optomechanics with stoichiometric SiN films
• Damping of Nanomechanical Resonators
• Continuous Force and Displacement Measurement Below the Standard Quantum Limit
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
• Sympathetic cooling of a membrane oscillator in a hybrid mechanical-atomic system
• Feedback cooling of a room temperature mechanical oscillator close to its motional groundstate
• The thermal conductivity of silicon nitride membranes is not sensitive to stress
• A phononic bandgap shield for high-Q membrane microresonators
• Light-mediated strong coupling between a mechanical oscillator and atomic spins one meter apart
• Generalized dissipation dilution in strained mechanical resonators
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• Quantum Electromechanics on Silicon Nitride Nanomembranes
• Quantum correlations of light due to a room temperature mechanical oscillator for force metrology
• Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics
• Microfabrication of large area high-stress silicon nitride membranes for optomechanical devices
• Engineering the dissipation of crystalline micromechanical resonators
• Clamp-tapering increases the quality factor of stressed nanobeams
• Nonlinear Nanomechanical Mass Spectrometry at the Single-Nanoparticle Level
• Spatial modulation of nonlinear flexural vibrations of membrane resonators
• Stress control of tensile-strained In${}_{1-x}$Ga${}_x$P nanomechanical string resonators

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• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
• Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator
• Relaxation and dynamics of high-stress pre-displaced string resonators
• Nano-beam clamping revisited
• Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators