High quality mechanical and optical properties of commercial silicon nitride membranes

Abstract

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2E-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

arXiv comment4 pages, 4 figures

References in corpus (7)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Optomechanical entanglement between a movable mirror and a cavity field
• Towards quantum superpositions of a mirror
• Cooling a nanomechanical resonator with quantum back-action
• A Scheme to Probe the Decoherence of a Macroscopic Object
• Classical to Quantum Transition of a Driven Nonlinear Nanomechanical Resonator
• Thermoelastic relaxation in elastic structures with applications to thin plates

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