High quality mechanical and optical properties of commercial silicon nitride membranes

Abstract

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2E-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

4 pages, 4 figures

References in corpus (5)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Optomechanical entanglement between a movable mirror and a cavity field
• Cooling a nanomechanical resonator with quantum back-action
• Classical to Quantum Transition of a Driven Nonlinear Nanomechanical Resonator
• Thermoelastic relaxation in elastic structures with applications to thin plates

Cited by in corpus (36)

• Dispersive optomechanics: a membrane inside a cavity
• Quantum-Coherent Nanoscience
• Creating and Verifying a Quantum Superposition in a Micro-optomechanical System
• Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning
• High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics
• Cavity-Enhanced Long-Distance Coupling of an Atomic Ensemble to a Micromechanical Membrane
• Hybrid opto-mechanical systems with nitrogen-vacancy centers
• Optomechanical sideband cooling of a thin membrane within a cavity
• Prospects for cooling nanomechanical motion by coupling to a superconducting microwave resonator
• Nanomechanical Dissipation and Strain Engineering
• A controllable two-membrane-in-the-middle cavity optomechanical system
• Fractal-like mechanical resonators with soft-clamped fundamental mode
• Hybrid quantum systems with trapped charged particles
• Effect of oxygen plasma on nanomechanical silicon nitride resonators
• Relaxation of experimental parameters in a Quantum-Gravity Induced Entanglement of Masses Protocol using electromagnetic screening
• Tensile strained $I{n}_{x}G{a}_{1-x}P$ membranes for cavity optomechanics
• Observation of the Three-Mode Parametric Instability
• Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
• High-Q silicon nitride drum resonators strongly coupled to gates
• Dynamical backaction in an ultrahigh-finesse fiber-based microcavity
• Dicke-type phase transition in a multimode optomechanical system
• Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride
• Monolayer graphene as dissipative membrane in an optical resonator
• Self-calibrating gas pressure sensor with a 10-decade measurement range
• Key signal contributions in photothermal deflection spectroscopy
• Collision-resolved pressure sensing
• Ultra-coherent nanomechanical resonators based on inverse design
• Parametric amplification of light in a cavity with a moving dielectric membrane: Landau-Zener problem for the Maxwell field
• Performance of Superconducting Resonators Suspended on SiN Membranes
• Mechanical mode engineering with orthotropic metamaterial membranes
• Precision and Casimir Force Measurements in Superfluid and Vacuum with Silicon Nitride Membranes
• Mechanical characterization of a membrane with an on-chip loss shield in a cryogenic environment
• Spatial mapping of intrinsic and readout nonlinearities in a strongly-driven micromechanical membrane
• High-$Q$ membrane resonators using ultra-high-stress crystalline TiN films
• Measuring nanomechanical motion with a microwave cavity interferometer
• High Resolution Measurement of Near-Field Radiative Heat Transfer enabled by Nanomechanical Resonators