233 citations · 233 across the 1 of their papers we have counts for
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B. M. Zwickl, W. E. Shanks, A. M. Jayich +4
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7…