High quality mechanical and optical properties of commercial silicon nitride membranes
arXiv:0711.2263 · doi:10.1063/1.2884191
Abstract
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2E-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.
4 pages, 4 figures
References in corpus (5)
- Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
- Optomechanical entanglement between a movable mirror and a cavity field
- Cooling a nanomechanical resonator with quantum back-action
- Classical to Quantum Transition of a Driven Nonlinear Nanomechanical Resonator
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Cited by in corpus (5)
- Dispersive optomechanics: a membrane inside a cavity
- Creating and Verifying a Quantum Superposition in a Micro-optomechanical System
- Prospects for cooling nanomechanical motion by coupling to a superconducting microwave resonator
- Precision and Casimir Force Measurements in Superfluid and Vacuum with Silicon Nitride Membranes
- Measuring nanomechanical motion with a microwave cavity interferometer