Collimation and finite-size effects in suspended resonant guided-mode gratings

Abstract

The optical transmission of resonant guided-mode gratings patterned on suspended silicon nitride thin films and illuminated at normal incidence with a Gaussian beam are investigated both experimentally and theoretically. Effects due to the beam focusing and its finite size are accounted for by a phenomenological coupled mode model whose predictions are found to be in very good agreement with the experimentally measured spectra for various grating structures and beam sizes, and which allow for a detailed analysis of the respective magnitude of these effects. These results are highly relevant for the design and optimization of such suspended structured films which are widely used for photonics, sensing and optomechanics applications.

arXiv comment13 pages, 13 figures

References in corpus (25)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Cavity optomechanics with stoichiometric SiN films
• Strong coupling and long-range collective interactions in optomechanical arrays
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• First-order optical spatial differentiator based on a guided-mode resonant grating
• Two-membrane cavity optomechanics
• High-finesse Fabry-Perot cavities with bidimensional Si${}_3$N${}_4$ photonic-crystal slabs
• Reconfigurable long-range phonon dynamics in optomechanical arrays
• Mode competition and anomalous cooling in a multimode phonon laser
• Integrated optomechanical arrays of two high reflectivity SiN membranes
• High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling
• A controllable two-membrane-in-the-middle cavity optomechanical system
• Centimeter-scale suspended photonic crystal mirrors
• Laser Optomechanics
• Cavity Quantum Electrodynamics with Frequency-Dependent Reflectors
• Mechanically Compliant Grating Reflectors for Optomechanics
• Cavity Optomechanics with Photonic Bound States in the Continuum
• Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
• Optomechanical characterization of silicon nitride membrane arrays
• Optical spatial differentiation with suspended subwavelength gratings
• Microcavities with suspended subwavelength structured mirrors
• Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity
• Profilometry and stress analysis of suspended nanostructured thin films
• Guided-mode resonance filter extended-cavity diode laser