Collimation and finite-size effects in suspended resonant guided-mode gratings

Abstract

The optical transmission of resonant guided-mode gratings patterned on suspended silicon nitride thin films and illuminated at normal incidence with a Gaussian beam are investigated both experimentally and theoretically. Effects due to the beam focusing and its finite size are accounted for by a phenomenological coupled mode model whose predictions are found to be in very good agreement with the experimentally measured spectra for various grating structures and beam sizes, and which allow for a detailed analysis of the respective magnitude of these effects. These results are highly relevant for the design and optimization of such suspended structured films which are widely used for photonics, sensing and optomechanics applications.

13 pages, 13 figures

References in corpus (9)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• A controllable two-membrane-in-the-middle cavity optomechanical system
• Centimeter-scale suspended photonic crystal mirrors
• Cavity Quantum Electrodynamics with Frequency-Dependent Reflectors
• Cavity Optomechanics with Photonic Bound States in the Continuum
• Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
• Optical spatial differentiation with suspended subwavelength gratings
• Profilometry and stress analysis of suspended nanostructured thin films
• Guided-mode resonance filter extended-cavity diode laser