Optomechanical characterization of silicon nitride membrane arrays

Abstract

We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging from 8.5 to 200 $\mu$m. Their optical properties are accurately determined using a combination of broadband and monochromatic illuminations and the lowest vibrational mode frequencies and mechanical quality factors are determined interferometrically. The results and techniques demonstrated are promising for investigations of collective phenomena in optomechanical arrays.

5 pages, 5 figures

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Cited by in corpus (24)

• Two-membrane cavity optomechanics
• Integrated optomechanical arrays of two high reflectivity SiN membranes
• A controllable two-membrane-in-the-middle cavity optomechanical system
• Cavity Optomechanics with Photonic Bound States in the Continuum
• Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
• Optical spatial differentiation with suspended subwavelength gratings
• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
• Flexure-Tuned Membrane-at-the-Edge Optomechanical System
• Microcavities with suspended subwavelength structured mirrors
• Effects of pressure on suspended micromechanical membrane arrays
• Squeeze film pressure sensors based on SiN membrane sandwiches
• Membrane sandwich squeeze film pressure sensors
• Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity
• Squeeze film absolute pressure sensors with sub-millipascal sensitivity
• Electromechanics in vertically coupled nanomembranes
• Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes
• Narrow-linewidth Fano microcavities with resonant subwavelength grating mirror
• Long-range optomechanical interactions in SiN membrane arrays
• Generation of stable Gaussian cluster states in optomechanical systems with multifrequency drives
• Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
• Polarization-independent optical spatial differentiation with a doubly-resonant one-dimensional guided-mode grating
• Light-matter interactions in multi-element resonators
• Collimation and finite-size effects in suspended resonant guided-mode gratings
• Optical microcavity with a pair of suspended resonant mirrors