Squeeze film pressure sensors based on SiN membrane sandwiches
arXiv:1906.07980 · doi:10.1016/j.sna.2019.111588
Abstract
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10^-3-50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.
arXiv comment9 pages, 10 figures
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- Membrane sandwich squeeze film pressure sensors
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