Accurate, precise pressure sensing with tethered optomechanics

Abstract

We show that optomechanical pressure sensors with characterized density and thickness can achieve uncertainty as low as 1.1 % via comparison with a secondary pressure standard. The agreement between the secondary standard and our optomechanical sensors is a necessary step towards using optomechanical devices as primary pressure sensors. Our silicon nitride and silicon carbide sensors are short-term and long-term stable, displaying Allan deviations compatible with better than 1 % precision and baseline drift significantly lower than the secondary standard. Our measurements also yield the in situ thin-film density of our sensors with 1 % total uncertainty or lower, aiding development of other optomechanical sensors. Our results demonstrate that optomechanical pressure sensors can achieve accuracy, precision, and drift sufficient to replace high performance legacy pressure gauges.

15 pages, 5 figures

References in corpus (16)

• emcee: The MCMC Hammer
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Real-time optimal quantum control of mechanical motion at room temperature
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• A general procedure for thermomechanical calibration of nano/micro-mechanical resonators
• Dissipation in ultrahigh quality factor SiN membrane resonators
• Gas damping force noise on a macroscopic test body in an infinite gas reservoir
• Gas-induced friction and diffusion of rigid rotors
• Quantum-based vacuum metrology at NIST
• High-Strength Amorphous Silicon Carbide for Nanomechanics
• Accurate measurement of the loss rate of cold atoms due to background gas collisions for the quantum-based cold atom vacuum standard
• Absolute pressure and gas species identification with an optically levitated rotor
• Self-calibrating gas pressure sensor with a 10-decade measurement range
• Squeeze film absolute pressure sensors with sub-millipascal sensitivity
• Collision-resolved pressure sensing