CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

Abstract

We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic temperatures. As an example of the potential of the platform, we demonstrate a compact (~40 μm diameter) silicon nitride ring resonator modulator operating at 780 nm with intrinsic quality factors in excess of 1.5 million, >10 dB change in extinction ratio with 2 V applied, a switching time less than 4 ns, and a switching energy of 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7 K. At 7 K, the device obtains a resistance of approximately 20 Teraohms, allowing it to operate with sub-picowatt electrical power dissipation. We further demonstrate a Mach-Zehnder modulator constructed in the same platform with piezoelectrically tunable phase shifting arms, with 750 ns switching time constant and 20 nW steady-state power dissipation at room temperature.

References in corpus (12)

• Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing
• Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
• Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies
• Low-loss integrated photonics for the blue and ultraviolet regime
• Lithium Niobate Piezo-optomechanical Crystals
• Hybrid Integrated Photonics Using Bulk Acoustic Resonators
• Quantum Electromechanics on Silicon Nitride Nanomembranes
• Acousto-optic modulation of a photonic crystal nanocavity with Lamb waves in microwave K band
• Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications
• Accurate measurement of scattering and absorption loss in microphotonic devices
• Design of tunable GHz-frequency optomechanical crystal resonators
• PORT: A piezoelectric optical resonance tuner

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