High-speed programmable photonic circuits in a cryogenically compatible, visible-NIR 200 mm CMOS architecture

Abstract

Recent advances in photonic integrated circuits (PICs) have enabled a new generation of "programmable many-mode interferometers" (PMMIs) realized by cascaded Mach Zehnder Interferometers (MZIs) capable of universal linear-optical transformations on N input-output optical modes. PMMIs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, PMMI implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here, we introduce a large-scale PMMI platform, based on a 200 mm CMOS process, that uses aluminum nitride (AlN) piezo-optomechanical actuators coupled to silicon nitride (SiN) waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible to near-infrared wavelengths. Moreover, the vanishingly low holding-power consumption of the piezo-actuators enables these PICs to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications.

18 pages, 5 figures, 7 supplementary figures

References in corpus (7)

• Integrated photonics on thin-film lithium niobate
• Quantum circuits with many photons on a programmable nanophotonic chip
• Efficient, Compact and Low Loss Thermo-Optic Phase Shifter in Silicon
• On-Chip Detection of Entangled Photons by Scalable Integration of Single-Photon Detectors
• Ultra-low loss integrated visible photonics using thin-film lithium niobate
• Hardware error correction for programmable photonics
• MEMS for Photonic Integrated Circuits

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