Integrated photonics on thin-film lithium niobate
arXiv:2102.11956 · doi:10.1364/AOP.411024
Abstract
Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in our cell phones. This half-century-old material is currently embracing a revolution in thin-film LN integrated photonics. The success of manufacturing wafer-scale, high-quality, thin films of LN on insulator (LNOI), accompanied with breakthroughs in nanofabrication techniques, have made high-performance integrated nanophotonic components possible. With rapid development in the past few years, some of these thin-film LN devices, such as optical modulators and nonlinear wavelength converters, have already outperformed their legacy counterparts realized in bulk LN crystals. Furthermore, the nanophotonic integration enabled ultra-low-loss resonators in LN, which unlocked many novel applications such as optical frequency combs and quantum transducers. In this Review, we cover -- from basic principles to the state of the art -- the diverse aspects of integrated thin-film LN photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optics. We also identify challenges that this platform is currently facing and point out future opportunities. The field of integrated LNOI photonics is advancing rapidly and poised to make critical impacts on a broad range of applications in communication, signal processing, and quantum information.
arXiv commentReview article. 94 pages, 44 figures, 497 references
References in corpus (132)
- Cavity Optomechanics
- Photonic Floquet Topological Insulators
- Quantum computational advantage using photons
- All-optical signal processing platforms for CMOS compatible integrated nonlinear optics
- Superconducting Qubits: Current State of Play
- Integrated Photonic Quantum Technologies
- Frequency comb spectroscopy
- High-Performance Hybrid Silicon and Lithium Niobate Mach-Zehnder Modulators for 100 Gbit/s and Beyond
- Microresonator Soliton Dual-Comb Spectroscopy
- Broadband electro-optic frequency comb generation in an integrated microring resonator
- Superconducting nanowire single-photon detectors: physics and applications
- Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator
- Multidimensional quantum entanglement with large-scale integrated optics
- Ultrahigh-efficiency second-harmonic generation in nanophotonic PPLN waveguides
- Photonic quantum information processing: a concise review
- Nanophotonic Lithium Niobate Electro-optic Modulators
- Electro-optically tunable microring resonators in lithium niobate
- High-performance Coherent Optical Modulators based on Thin-film Lithium Niobate Platform
- Quantum transduction of optical photons from a superconducting qubit
- Synthetic Dimension in Photonics
- Generation of very flat optical frequency combs from continuous-wave lasers using cascaded intensity and phase modulators driven by tailored radio frequency waveforms
- On-chip dual comb source for spectroscopy
- Periodically poled thin film lithium niobate microring resonators with a second-harmonic generation efficiency of 250,000%/W
- Comb-Based Radio-Frequency Photonic Filters with Rapid Tunability and High Selectivity
- Lithium niobate photonic-crystal electro-optic modulator
- Development of Quantum InterConnects for Next-Generation Information Technologies
- Large-Scale Optical Neural Networks based on Photoelectric Multiplication
- Monolithic photonic circuits for Kerr frequency comb generation, filtering and modulation
- Synthetic dimensions in integrated photonics: From optical isolation to 4D quantum Hall physics
- Entangled photon-pair generation in periodically-poled thin-film lithium niobate waveguides
- Hybrid Silicon Photonic-Lithium Niobate Electro-Optic Mach-Zehnder Modulator Beyond 100 GHz Bandwidth
- On-Chip Detection of Entangled Photons by Scalable Integration of Single-Photon Detectors
- Nonlinear and Quantum Optics with Whispering Gallery Resonators
- Octave-spanning dissipative Kerr soliton frequency combs in microresonators
- Perspectives on quantum transduction
- Ultra-low loss integrated visible photonics using thin-film lithium niobate
- A single photonic cavity with two independent physical synthetic dimensions
- Frequency-encoded photonic qubits for scalable quantum information processing
- Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency
- Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
- Femtosecond Time-Bin Entangled Qubits for Quantum Communication
- Photonic gauge potential in a system with a synthetic frequency dimension
- Integrated high quality factor lithium niobate microdisk resonators
- Probing spin-phonon interactions in silicon carbide with Gaussian acoustics
- Second harmonic generation in nano-structured thin-film lithium niobate waveguides
- Electronically Programmable Photonic Molecule
- Efficient single sideband microwave to optical conversion using an electro-optical whispering gallery mode resonator
- Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators
- Breaking time-reversal symmetry with acoustic pumping of nanophotonic circuits
- Electrically-driven Acousto-optics and Broadband Non-reciprocity in Silicon Photonics
- Hybrid integration of solid-state quantum emitters on a silicon photonic chip
- Mid-infrared dual-comb spectroscopy with electro-optic modulators
- Nonreciprocal Inter-band Brillouin Modulation
- Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits
- Towards 1% single photon nonlinearity with periodically-poled lithium niobate microring resonators
- Metasurface-assisted phase-matching-free second harmonic generation in lithium niobate waveguides
- Lithium niobate micro-disk resonators of quality factors above 10^7
- Wafer-scale low-loss lithium niobate photonic integrated circuits
- Ultra-bright Quantum Photon Sources on Chip
- Ultra-low loss photonic circuits in Lithium Niobate On Insulator
- Cavity quantum electro-optics
- Resonant Electro-Optic Frequency Comb
- Coherent two-octave-spanning supercontinuum generation in lithium-niobate waveguides
- Coherent conversion between microwave and optical photons -- an overview of physical implementations
- Waveguide Integrated Superconducting Single Photon Detectors Implemented as Coherent Perfect Absorbers
- Experimental band structure spectroscopy along a synthetic dimension
- On-chip Erbium-doped lithium niobate microcavity laser
- An integrated low-voltage broadband lithium niobate phase modulator
- Frequency Multiplexing for Quasi-Deterministic Heralded Single-Photon Sources
- Doubly-resonant nonlinear photonic crystal cavity based on a bound state in the continuum
- Gallium Arsenide (GaAs) Quantum Photonic Waveguide Circuits
- Nanostructuring lithium niobate substrates by focused ion beam milling
- Lithium Niobate Piezo-optomechanical Crystals
- Controlling the flow of light using the inhomogeneous effective gauge field that emerges from dynamic modulation
- Ultrabroadband supercontinuum generation and frequency-comb stabilization using on-chip waveguides with both cubic and quadratic nonlinearities
- Self-referenced frequency combs using high-efficiency silicon-nitride waveguides
- Cavity quantum electro-optics. II. Input-output relations between traveling optical and microwave fields
- High-dimensional frequency crystals and quantum walks in electro-optic microcombs
- Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate
- Optical parametric generation in a lithium niobate microring with modal phase matching
- Self-organized nonlinear gratings for ultrafast nanophotonics
- Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation
- Integrated microwave acousto-optic frequency shifter on thin-film lithium niobate
- High coupling efficiency grating couplers on lithium niobate on insulator
- An Integrated Photonic Platform for Rare-Earth Ions in Thin Film Lithium Niobate
- Heralded single photons based on spectral multiplexing and feed-forward control
- Integration of Quantum Emitters with Lithium Niobate Photonics
- Spectral shearing of quantum light pulses by electro-optic phase modulation
- Mitigating photorefractive effect in thin-filmlithium niobate microring resonators
- Second-harmonic generation in periodically-poled thin film lithium niobate wafer-bonded on silicon
- Octave-spanning supercontinuum generation in a silicon-rich nitride waveguide
- Limits to compression with cascaded quadratic soliton compressors
- High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate
- Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire
- A controlled-NOT gate for frequency-bin qubits
- Cavity quantum electro-optics: Microwave-telecom conversion in the quantum ground state
- Efficient quantum microwave-to-optical conversion using electro-optic nanophotonic coupled-resonators
- Frequency-Domain Quantum Interference with Correlated Photons from an Integrated Microresonator
- Incorporation of erbium ions into thin-film lithium niobate integrated photonics
- Improved second harmonic performance in periodically poled LNOI waveguides through engineering of lateral leakage
- Silicon photodetector for integrated lithium niobate photonics
- Controllable Raman-like nonlinearities from non-stationary cascaded quadratic processes
- Lithium Niobate Michelson Interferometer Modulator on Silicon-On-Insulator Platform
- High-Q two-dimensional lithium niobate photonic crystal slab nanoresonators
- Scaling laws for soliton pulse compression by cascaded quadratic nonlinearities
- Efficient light coupling between an ultra-low loss lithium niobate waveguide and an adiabatically tapered single mode optical fiber
- Nanostructuring of LNOI for efficient edge coupling
- On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes
- Photon-level tuning of photonic nanocavities
- Piezoelectric transduction of a wavelength-scale mechanical waveguide
- Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications
- Integrated transition edge sensors on lithium niobate waveguides
- Nonlinear states and dynamics in a synthetic frequency dimension
- Photonic dissipation control for Kerr soliton generation in strongly Raman-active media
- Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser assisted chemo-mechanical polish
- Dynamic localization of light from a time-dependent effective gauge field for photons
- Haldane Quantum Hall Effect for Light in a Dynamically Modulated Array of Resonators
- Independent indistinguishable quantum light sources on a reconfigurable photonic integrated circuit
- Second harmonic microscopy of poled x-cut thin film lithium niobate: Understanding the contrast mechanism
- Properties of a rare-earth-ion-doped waveguide at sub-Kelvin temperatures for quantum signal processing
- A self-starting bi-chromatic LiNbO3 soliton microcomb
- Single envelope equation modelling of multi-octave comb arrays in microresonators with quadratic and cubic nonlinearity
- Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
- Cluster state quantum computing in optical fibers
- Real-time Electrical Tuning of an Optical Spring on a Monolithically Integrated Ultrahigh Q Lithium Nibote Microresonator
- Topologically non-trivial Floquet band structure in a system undergoing photonic transitions in the ultra-strong coupling regime
- Molecular Beam Epitaxy Growth of High Crystalline Quality LiNbO
- Quadratic soliton mode-locked degenerate optical parametric oscillator
- Review of measurements of Kerr nonlinearities in lithium niobate: the role of the delayed Raman response
- Synthetic gauge potential and effective magnetic field in a Raman medium undergoing molecular modulation
- Gigahertz acousto-optic modulation and frequency shifting on etchless lithium niobate integrated platform
- Engineered discreteness enables observation and control of chimera-like states in a system with local coupling
Cited by in corpus (141)
- Quantum networks based on color centers in diamond
- Integrated Electro-Optic Isolator on Thin Film Lithium Niobate
- Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing
- High-efficiency and broadband electro-optic frequency combs enabled by coupled micro-resonators
- High-speed programmable photonic circuits in a cryogenically compatible, visible-NIR 200 mm CMOS architecture
- Spatially entangled photon-pairs from lithium niobate nonlocal metasurfaces
- Integrated Pockels Laser
- Gigahertz free-space electro-optic modulators based on Mie resonances
- A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform
- Few-cycle vacuum squeezing in nanophotonics
- Electrically-pumped high-power laser transmitter integrated on thin-film lithium niobate
- Reduced Material Loss in Thin-film Lithium Niobate Waveguides
- Photonic chip-based continuous-travelling-wave parametric amplifier
- Sub-1 Volt and High-Bandwidth Visible to Near-Infrared Electro-Optic Modulators
- Terahertz waveform synthesis from integrated lithium niobate circuits
- Electrical Control of Surface Acoustic Waves
- Integrated Quantum Optical Phase Sensor
- Spectral control of nonclassical light using an integrated thin-film lithium niobate modulator
- Ultra-high-linearity integrated lithium niobate electro-optic modulators
- Systematic Investigation of Millimeter-Wave Optic Modulation Performance in Thin-Film Lithium Niobate
- Ultrabroadband thin-film lithium tantalate modulator for high-speed communications
- A single-frequency single-resonator laser on erbium-doped lithium niobate on insulator
- Integrated Triply Resonant Electro-Optic Frequency Comb in Lithium Tantalate
- Efficient photon-pair generation in layer-poled lithium niobate nanophotonic waveguides
- Octave-spanning tunable parametric oscillation in nanophotonics
- Octave-spanning Kerr soliton frequency combs in dispersion- and dissipation-engineered lithium niobate microresonators
- Realization of a multi-output quantum pulse gate for decoding high-dimensional temporal modes of single-photon states
- Hyperentangled Time-bin and Polarization Quantum Key Distribution
- Integrated lithium niobate optical phased array for two-dimensional beam steering
- Micro-transfer-printed Thin film lithium niobate (TFLN)-on-Silicon Ring Modulator
- Integrated O- and C-band Silicon-Lithium Niobate Mach-Zehnder Modulators with 100 GHz Bandwidth, Low Voltage, and Low Loss
- Stable electro-optic modulators using thin-film lithium tantalate
- Quasi-phase-matched up- and down-conversion in periodically poled layered semiconductors
- Enhanced infrared vision by nonlinear up-conversion in nonlocal metasurfaces
- On-chip single-mode thin film lithium niobate laser based on Sagnac loop reflectors
- Piezoelectric actuation for integrated photonics
- Induced-photorefractive attack against Quantum Key Distribution
- Improved heralded single-photon source with a photon-number-resolving superconducting nanowire detector
- Single-frequency integrated laser on erbium-doped lithium niobate on insulator
- A Hybrid Integrated Quantum Key Distribution Transceiver Chip
- Two-colour dissipative solitons and breathers in microresonator second-harmonic generation
- Electrically driven compact hybrid lithium niobate microring laser
- Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density SiN photonic integrated circuits
- Stimulated Brillouin scattering by surface acoustic waves in lithium niobate waveguides
- Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform
- Temporal trapping: a route to strong coupling and deterministic optical quantum computation
- Advances in Bosonic Quantum Error Correction with Gottesman-Kitaev-Preskill Codes: Theory, Engineering and Applications
- Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
- Mid-Infrared Cross-Comb Spectroscopy
- Phase-transition microcavity laser
- On-chip multi-color microdisk laser on Yb3+-doped thin-film lithium niobate
- Ultraviolet astronomical spectrograph calibration with laser frequency combs from nanophotonic lithium niobate waveguides
- Tunable and efficient ultraviolet generation in nanophotonic lithium niobate
- High-power and narrow-linewidth laser on thin-film lithium niobate enabled by photonic wire bonding
- Silicon rich nitride-lithium niobate on insulator platform for photonics integrated circuits
- High-efficiency second-harmonic and sum-frequency generation in a silicon nitride microring integrated with few-layer GaSe
- Spectrally multiplexed heralded single photon source at telecom-band
- Exciton Assisted Deeply Subwavelength Nano-Photonics
- Stable and compact RF-to-optical link using lithium niobate on insulator waveguides
- Bidirectional microwave-optical transduction based on integration of high-overtone bulk acoustic resonators and photonic circuits
- Highly efficient visible and near-IR photon pair generation with thin-film lithium niobate
- Widely-tunable, doubly-resonant Raman scattering on diamond in an open microcavity
- Cross-Polarized Stimulated Brillouin Scattering in Lithium Niobate Waveguides
- Mesoscopic ultrafast nonlinear optics -- The emergence of multimode quantum non-Gaussian physics
- Photon Conversion in Thin-film Lithium Niobate Nanowaveguides: A Noise Analysis
- Coherent microwave, optical, and mechanical quantum control of spin qubits in diamond
- CMOS-compatible photonic integrated circuits on thin-film ScAlN
- A 3.584 Tbps coherent receiver chip on InP-LiNbO3 wafer-level integration platform
- Efficient generation of broadband photon pairs in shallow-etched lithium niobate nanowaveguide
- A chip-based optoelectronic-oscillator frequency comb
- Mixing second and third-order nonlinear interactions in nanophotonic lithium-niobate waveguides
- Single Pulse Manipulations in Synthetic Time-frequency Space
- Visible-telecom broadband optical isolator based on dynamic modulation in thin-film lithium niobate
- Near perfect two-photon interference out a down-converter on a silicon photonic chip
- Acoustic resonators above 100 GHz
- Quantum logical controlled-NOT gate in a lithium niobate-on-insulator photonic quantum walk
- Engineering high Pockels coefficients in thin-film strontium titanate for cryogenic quantum electro-optic applications
- Photonic sampled and quantized analog-to-digital converters on thin-film lithium niobate platform
- Soliton microcombs in X-cut LiNbO3 microresonators
- Ultrabroadband tunable difference frequency generation in standardized thin-film lithium niobate platform
- Electro-optically tunable single-frequency lasing from neodymium-doped lithium niobate microresonators
- Low-phase-noise surface-acoustic-wave oscillator using an edge mode of a phononic band gap
- Topological edge states in equidistant arrays of Lithium Niobate nano-waveguides
- Arrayed waveguide gratings in lithium tantalate integrated photonics
- Hall mobilities and sheet carrier densities in a single LiNbO conductive ferroelectric domain wall
- On-chip quantum interference between independent lithium niobate-on-insulator photon-pair sources
- Fundamental charge noise in electro-optic photonic integrated circuits
- Improving Linewidth and Extinction Ratio Performances of Lithium Niobate Ring Modulator Using Ring-pair Structure
- Demonstration of Hong-Ou-Mandel interference in an LNOI directional coupler
- Time-resolved Hanbury Brown-Twiss interferometry of on-chip biphoton frequency combs using Vernier phase modulation
- Coherent optical control of a superconducting microwave cavity via electro-optical dynamical back-action
- LiNbO volatile memristors for reservoir computing
- Tunable double notch filter on thin-film lithium niobate platform
- Heterogeneous integration of superconducting thin films and epitaxial semiconductor heterostructures with Lithium Niobate
- Absorption loss and Kerr nonlinearity in barium titanate waveguides
- Design of a release-free piezo-optomechanical quantum transducer
- Construction of various time-dependent Hamiltonians on a single photonic chip
- Hybrid integrated near UV lasers using the deep-UV Al2O3 platform
- A fiber array architecture for atom quantum computing
- Efficient and robust second-harmonic generation in thin-film lithium niobate using modal phase matching
- Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate
- An alkali-referenced vector spectrum analyzer for visible-light integrated photonics
- Ladder of Eckhaus instabilities and parametric conversion in chi(2) microresonators
- Single photon optical bistability
- Programmable Bell State Generation in an Integrated Thin Film Lithium Niobate Circuit
- On-chip 7 GHz acousto-optic modulators for visible wavelengths
- Towards the reproducible fabrication of conductive ferroelectric domain walls into lithium niobate bulk single crystals
- Rhythmic soliton interactions for integrated dual-microcomb spectroscopy
- New Insights into Refractive Indices and Birefringence of Undoped and MgO-Doped Lithium Niobate Crystals at High Temperatures
- Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits
- A fixed phase tunable directional coupler based on coupling tuning
- Temporal modulation of a spectral compressor for efficient quantum storage
- Probing Ferroelectric Phase Transitions in Barium Titanate Single Crystals via Second Harmonic Generation Microscopy
- On-chip pulse shaping of entangled photons
- Optimization of the degenerate optical parametric oscillations threshold in bichromatically pumped microresonator
- Solitons near avoided mode crossing in nanowaveguides
- Passive All-Optical Nonlinear Neuron Activation via PPLN Nanophotonic Waveguides
- Experimental entanglement swapping through single-photon nonlinearity
- Ultrashort-pulse-pumped, single-mode type-0 squeezers in lithium niobate nanophotonics
- Tunable linear-optical phase amplification
- Scalable low-latency entanglement distribution for distributed quantum computing
- Coherent mode-combined ultra-narrow-linewidth single-mode micro-disk laser
- Ultra-broadband spectral and polarisation entanglement using dispersion-engineered nanophotonic waveguides
- On-chip cavity electro-acoustics using lithium niobate phononic crystal resonators
- Graph model for multiple scattering in lithium niobate on insulator integrated photonic networks
- Self-Aligned Heterogeneous Quantum Photonic Integration
- Enhancing Nonreciprocity through Squeezing-Induced Symmetry Breaking
- Investigation of nanophotonic lithium niobate waveguides for on-chip evanescent wave sensing
- Topological gap solitons in equidistant lithium niobate waveguide arrays
- On-Chip Generation of Co-Polarized and Spectrally Separable Photon Pairs
- Lithium Niobate Photonic Topological Insulator-based Multi-Wavelength Optical Demultiplexer with Piezoelectric Switch-Off
- Passive and Deterministic Controlled-phase Gate for Single-photon Wavepackets Based on Time-reversal Symmetric Photon Transport
- Multi-scale second harmonic generation microscopy of ferroelectric domains in x-cut thin-film lithium niobate
- Switching, Amplifying, and Chirping Diode Lasers with Current Pulses for High Bandwidth Quantum Technologies
- Scalable quantum interference in integrated lithium niobate nanophotonics
- A vapor-cavity-QED system for quantum computation and communication
- Scalable Dark Matter Searches Using Integrated Photonics
- Integrated Photonic Devices in Thin-Film Barium Titanate: Opportunities and Challenges
- Sputtered AlN buffer layer for low-loss crystalline AlN-on-sapphire integrated photonics
- An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations
- State Engineering via Nonlinear Interferometry with Linear Spectral Phases