Heterogeneous integration of superconducting thin films and epitaxial semiconductor heterostructures with Lithium Niobate
arXiv:2302.02712 · doi:10.1088/1361-6463/acd7f9
Abstract
We report on scalable heterointegration of superconducting electrodes and epitaxial semiconductor quantum dots on strong piezoelectric and optically nonlinear lithium niobate. The implemented processes combine the sputter-deposited thin film superconductor niobium nitride and III-V compound semiconductor membranes onto the host substrate. The superconducting thin film is employed as a zero-resistivity electrode material for a surface acoustic wave resonator with internal quality factors representing a three-fold enhancement compared to identical devices with normal conducting electrodes. Superconducting operation of resonators is achieved to temperatures and electrical radio frequency powers . Heterogeneously integrated single quantum dots couple to the resonant phononic field of the surface acoustic wave resonator operated in the superconducting regime. Position and frequency selective coupling mediated by deformation potential coupling is validated using time-integrated and time-resolved optical spectroscopy. Furthermore, acoustoelectric charge state control is achieved in a modified device geometry harnessing large piezoelectric fields inside the resonator. The hybrid quantum dot - surface acoustic wave resonator can be scaled to higher operation frequencies and smaller mode volumes for quantum phase modulation and transduction between photons and phonons via the quantum dot. Finally, the employed materials allow for the realization of other types of optoelectronic devices, including superconducting single photon detectors and integrated photonic and phononic circuits.
submitted manuscript
References in corpus (20)
- Propagating phonons coupled to an artificial atom
- Silicon-Vacancy Spin Qubit in Diamond: A Quantum Memory Exceeding 10 ms with Single-Shot State Readout
- Ultra-low loss integrated visible photonics using thin-film lithium niobate
- Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies
- Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons
- Resolved Sideband Emission of InAs/GaAs Quantum Dots Strained by Surface Acoustic Waves
- Coherent Acoustic Control of a Single Silicon Vacancy Spin in Diamond
- Coupling a Surface Acoustic Wave to an Electron Spin in diamond via a Dark State
- Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate
- Dynamic Acoustic Control of Individual Optically Active Quantum Dot-like Emission Centers in Heterostructure Nanowires
- Surface acoustic wave devices on bulk ZnO at low temperature
- Directional and dynamic modulation of the optical emission of an individual GaAs nanowire using surface acoustic waves
- Enhanced sequential carrier capture into individual quantum dots and quantum posts controlled by surface acoustic waves
- Multiharmonic frequency-chirped transducers for surface-acoustic-wave optomechanics
- On-chip generation and dynamic piezo-optomechanical rotation of single photons
- Independent dynamic acousto-mechanical and electrostatic control of individual quantum dots in a LiNbO-GaAs hybrid
- A Hybrid (Al)GaAs-LiNbO Surface Acoustic Wave Resonator for Cavity Quantum Dot Optomechanics
- Radio frequency occupancy state control of a single nanowire quantum dot
- Surface acoustic wave controlled charge dynamics in a thin InGaAs quantum well
- Photon scattering from a quantum acoustically modulated two-level system