Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate

Abstract

Phonons at gigahertz frequencies interact with electrons, photons, and atomic systems in solids, and therefore have extensive applications in signal processing, sensing, and quantum technologies. Surface acoustic wave (SAW) resonators that confine surface phonons can play a crucial role in such integrated phononic systems due to small mode size, low dissipation, and efficient electrical transduction. To date, it has been challenging to achieve high quality (Q) factor and small phonon mode size for SAW resonators at gigahertz frequencies. Here, we present a methodology to design compact high-Q SAW resonators on lithium niobate operating at gigahertz frequencies. We experimentally verify out designs and demonstrate Q factors in excess of $2\times 10^4$ at room temperature ($6\times 10^4$ at 4 Kelvin) and mode area as low as $1.87{\lambda }^2$. This is achieved by phononic band structure engineering, which provides high confinement with low mechanical loss. The frequency-Q products (fQ) of our SAW resonators are greater than $10^{13}$. These high-fQ and small mode size SAW resonators could enable applications in quantum phononics and integrated hybrid systems with phonons, photons, and solid-state qubits.

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Cited by in corpus (35)

• Integrated photonics on thin-film lithium niobate
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• Coherent Acoustic Control of a Single Silicon Vacancy Spin in Diamond
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• Lithium Niobate Piezo-optomechanical Crystals
• Electrical Control of Surface Acoustic Waves
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• Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire
• Cavity magnomechanics with surface acoustic waves
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• Roadmap on Nanoscale Magnetic Resonance Imaging
• Superconducting electro-mechanics to test Diósi-Penrose effects of general relativity in massive superpositions
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• Low-phase-noise surface-acoustic-wave oscillator using an edge mode of a phononic band gap
• On-chip integrated waveguide amplifiers on Erbium-doped thin film lithium niobate on insulator
• Slow propagation of 2 GHz acoustical waves in a suspended GaAs on insulator phononic waveguide
• Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics
• Cavity magnomechanical coupling with coupled magnon modes in a synthetic antiferromagnet
• Merging mechanical bound states in the continuum in high-aspect-ratio phononic crystal gratings
• Heterogeneous integration of superconducting thin films and epitaxial semiconductor heterostructures with Lithium Niobate
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• Mode-sensitive magnetoelastic coupling in phononic-crystal magnomechanics
• High-impedance surface acoustic wave resonators
• Gigahertz acousto-optic modulation and frequency shifting on etchless lithium niobate integrated platform
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