Black Phosphorus Nanoelectromechanical Resonators Vibrating at Very High Frequencies

Abstract

We report on experimental demonstration of a new type of nanoelectromechanical resonators based on black phosphorus crystals. Facilitated by a highly efficient dry transfer technique, crystalline black phosphorus flakes are harnessed to enable drumhead resonators vibrating at high and very high frequencies (HF and VHF bands, up to ~100MHz). We investigate the resonant vibrational responses from the black phosphorus crystals by devising both electrical and optical excitation schemes, in addition to measuring the undriven thermomechanical motions in these suspended nanostructures. Flakes with thicknesses from ~200nm down to ~20nm clearly exhibit elastic characteristics transitioning from the plate to the membrane regime. Both frequency- and time-domain measurements of the nanomechanical resonances show that very thin black phosphorus crystals hold interesting promises for moveable and vibratory devices, and for semiconductor transducers where high-speed mechanical motions could be coupled to the attractive electronic and optoelectronic properties of black phosphorus.

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• Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate
• Visualizing the motion of graphene nanodrums
• Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy
• Dynamics of 2D Material Membranes
• Electronic Structure and the Properties of Phosphorene Systems
• Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators
• Atomically Engineered Hf0.5Zr0.5O2 Integrated Nano-Electromechanical Transducers
• A Perspective on Recent Advances in Phosphorene Functionalization and its Application in Devices
• Interferometric Motion Detection in Atomic Layer 2D Nanostructures: Visualizing Signal Transduction Efficiency and Optimization Pathways
• Mechanical Strain Effects on Black Phosphorus Nanoresonators
• Strength and Stability Analysis of a Single Walled Black Phosphorus Tube under Axial Compression
• Environmental, Thermal, and Electrical Susceptibility of Black Phosphorus Field Effect Transistors
• Spatially Resolved Optical Excitation of Mechanical Modes in Graphene NEMS
• Mechanical behavior of composite double wall nanotubes from carbon and phosphorous
• The Effects of Vacancy and Oxidation on Black Phosphorus Nanoresonators
• Valence force model and nanomechanics of single-layer phosphorene