Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators

Abstract

We report on fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS2 drumhead resonators (0.5 to 2um in diameter) offer fundamental resonances (f_0) in the very high frequency (VHF) band (up to ~120MHz) and excellent figures-of-merit up to f_0*Q ~ 3*10^10Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically ~15mN/m in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS2 crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.

arXiv comment14 pages, 6 figures

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• Nanomechanical Resonators: Toward Atomic Scale
• Controlling interlayer excitons in MoS2 layers grown by chemical vapor deposition
• Guide to optical spectroscopy of layered semiconductors
• Interface engineering of charge-transfer excitons in 2D lateral heterostructures
• Exciton spectroscopy and diffusion in MoSe2-WSe2 lateral heterostructures encapsulated in hexagonal boron nitride