High Quality Factor Surface Fabry-Perot Cavity of Acoustic Waves

Abstract

Surface acoustic wave (SAW) resonators are critical components in wireless communications and many sensing applications. They have also recently emerged as subject of study in quantum acoustics at the single phonon level. Acoustic loss reduction and mode confinement are key performance factors in SAW resonators. Here we report the design and experimental realization of a high quality factor Fabry-Perot SAW resonators formed in between tapered phononic crystal mirrors patterned on a GaN-on-sapphire material platform . The fabricated SAW resonators are characterized by both electrical network analyzer and optical heterodyne vibrometer. We observed standing Rayleigh wave inside the cavity, with an intrinsic quality factor exceeding 13,000 at ambient conditions.

arXiv comment5 pages, 3 figures

References in corpus (8)

• Cavity Optomechanics
• Propagating phonons coupled to an artificial atom
• Quantum acoustics with superconducting qubits
• Universal Quantum Transducers based on Surface Acoustic Waves
• Coupling a Surface Acoustic Wave to an Electron Spin in diamond via a Dark State
• Surface acoustic wave resonators in the quantum regime
• Phonitons as a sound-based analogue of cavity quantum electrodynamics
• Acoustic Traps and Lattices for Electrons in Semiconductors

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• Low-loss GHz frequency phononic integrated circuits in Gallium Nitride for compact radio-frequency acoustic wave devices
• Low-phase-noise surface-acoustic-wave oscillator using an edge mode of a phononic band gap
• High frequency guided mode resonances in mass-loaded, thin film gallium nitride surface acoustic wave devices
• Cavity magnomechanical coupling with coupled magnon modes in a synthetic antiferromagnet
• Visualization of Acoustic Power Flow in Suspended Thin-film Lithium Niobate Phononic Devices
• Polarization mode hybridization and conversion in phononic wire waveguides
• Mode-sensitive magnetoelastic coupling in phononic-crystal magnomechanics
• Dark Exciton Giant Rabi Oscillations with no External Magnetic Field
• Direct Visualization of Gigahertz Acoustic Wave Propagation in Suspended Phononic Circuits