On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

Abstract

We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First two metallic microelectrodes on the substrate were formed via femtosecond laser process. Then a high-Q lithium niobate microresonator located between the microelectrodes was fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Due to the efficient structure designing, high electro-optical tuning coefficient of 3.41 pm/V was observed.

arXiv comment6 pages, 3 figures

References in corpus (2)

• Electro-optically tunable microring resonators in lithium niobate
• Integrated high quality factor lithium niobate microdisk resonators

Cited by in corpus (8)

• Integrated photonics on thin-film lithium niobate
• Nanophotonic Lithium Niobate Electro-optic Modulators
• Lithium niobate micro-disk resonators of quality factors above 10^7
• Efficient Electro-optical Tuning of Optical Frequency Microcomb on a Monolithically Integrated High-Q Lithium Niobate Microdisk
• High-Q Lithium Niobate Microcavities and Their Applications
• Cavity quantum electrodynamics and chiral quantum optics
• Integrated optical quantum memory controlled by electro-optic effect
• Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser