Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser
arXiv:1712.01365
Abstract
We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
arXiv comment17 pages, 4 figures
References in corpus (11)
- Cavity Optomechanics
- Observation of Strong Coupling between One Atom and a Monolithic Microresonator
- Electro-optically tunable microring resonators in lithium niobate
- Controlling photonic structures using optical forces
- Naturally-phasematched second harmonic generation in a whispering gallery mode resonator
- Integrated high quality factor lithium niobate microdisk resonators
- Cavity optomechanical transduction sensing of single molecules
- Mechanical oscillation and cooling actuated by the optical gradient force
- On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes
- Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
- Second harmonic generation in a high-Q lithium niobate microresonator fabricated by femtosecond laser micromachining