Silicon photodetector for integrated lithium niobate photonics

Abstract

We demonstrate integration of an amorphous silicon photodetector with thin film lithium niobate photonic platform operating in the visible wavelength range. We present the details of the design, fabrication, integration and experimental characterization of this metal-semiconductor-metal photodetector that features responsivity of 22 mA/W to 37mA/W over the wide optical bandwidth spanning 635 nm to 850 nm wavelengths range.

References in corpus (5)

• High-Performance Hybrid Silicon and Lithium Niobate Mach-Zehnder Modulators for 100 Gbit/s and Beyond
• Large-Scale Optical Neural Networks based on Photoelectric Multiplication
• Ultra-low loss integrated visible photonics using thin-film lithium niobate
• Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits
• Integrated transition edge sensors on lithium niobate waveguides

Cited by in corpus (4)

• Integrated photonics on thin-film lithium niobate
• MoSe2/WS2 heterojunction photodiode integrated with a silicon nitride waveguide for visible light detection with high responsivity
• Spectrally separable photon-pair generation in dispersion engineered thin-film lithium niobate
• Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform