MoSe2/WS2 heterojunction photodiode integrated with a silicon nitride waveguide for visible light detection with high responsivity

Abstract

We demonstrate experimentally the realization and the characterization of a chip scale integrated photodetector for the visible and the near infrared spectral regime based on the integration of a MoSe2/WS2 heterojunction on top of a silicon nitride waveguide. This configuration achieves high responsivity of ~1 A/W at the wavelength of 780 nm (indicating an internal gain mechanism), while suppressing the dark current to the level of ~50 pA, much lower as compared to a reference sample of just MoSe2 without WS2. We have measured the power spectral density of the dark current to be as low as ~1x10^-12 A/Hz^0.5 , from which we extract the noise equivalent power (NEP) to be ~1x10^-12 W/Hz^0.5. To demonstrate the usefulness of the device, we use it for the characterization of the transfer function of a microring resonator that is integrated on the same chip as the photodetector. The ability to integrate local photodetectors on chip and to operate such devices with high performance at the visible and the near-infrared regime is expected to play a critical role in future integrated devices in the field of optical communications, quantum photonics, biochemical sensing and more.

arXiv comment13 pages, 4 figure. Supplementary materials available upon request

References in corpus (20)

• Experimental demonstration of memory-enhanced quantum communication
• Quantum many-body models with cold atoms coupled to photonic crystals
• Cleaning Interfaces in Layered Materials Heterostructures
• Large-scale integration of near-indistinguishable artificial atoms in hybrid photonic circuits
• Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride
• Graphene Phase Modulator
• Waveguide-integrated van der Waals heterostructure photodetector at telecom band with high speed and high responsivity
• On-chip integrated, silicon-graphene plasmonic Schottky photodetector, with high responsivity and avalanche photogain
• Searching for Exoplanets Using a Microresonator Astrocomb
• Near-direct bandgap $WS{e}_2$/$Re{S}_2$ type-II pn heterojunction for enhanced ultrafast photodetection and high-performance photovoltaics
• Waveguide-integrated, plasmonic enhanced graphene photodetectors
• Evanescent light-matter Interactions in Atomic Cladding Wave Guides
• 2D Semiconductor Nonlinear Plasmonic Modulators
• Strong coupling and high contrast all optical modulation in atomic cladding waveguides
• Silicon photodetector for integrated lithium niobate photonics
• Giant enhancement of silicon plasmonic SWIR photodetection using nanoscale self-organised metallic films
• WS2 Monolayers Coupled to Hyperbolic Metamaterial Nanoantennas: Broad Implications for Light-Matter-Interaction Applications
• Enhanced light-vapor interactions and all optical switching in a chip scale micro-ring resonator coupled with atomic vapor
• Coupling a thermal atomic vapor to an integrated ring resonator
• Chiral light-matter interactions in hot vapor cladded waveguides

Cited by in corpus (4)

• Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform
• 2D semiconductors as on-chip light sources for integrated nanophotonics
• Magneto-photoelectrochemical 2D heterojunction platform for biosensing detection
• 2D semiconductors as integrated light sources for plasmonic waveguides